Calculation method of linear temperature frequency characteristic of lgs surface acoustic wave temperature sensor
A technology of temperature sensor and surface acoustic wave, which is applied in the application field of surface acoustic wave sensor, can solve the problems of increasing the area and complexity of the device, reducing the performance of the resonator, etc., achieving the effect of excellent linear temperature characteristics and expanding the application range
Active Publication Date: 2019-12-10
UNIV OF ELECTRONICS SCI & TECH OF CHINA
View PDF5 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, the appearance of the opposite mode will reduce the performance of the resonator, and the number of IDT electrodes is more than that of the single-port single-mode SAW resonator, which increases the device area and complexity
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0029] The SAW resonator consists of an IDT and two sets of reflective gratings distributed symmetrically on both sides of the IDT. The IDT and the reflective gratings form a resonant cavity, such as figure 1 shown.
[0030] Using MESMS photolithography process will figure 1 The graph shown is made on a potassium lanthanum silicate piezoelectric substrate with the Euler angle tangential (0°, 138.5°, 27°), and then a layer of Au electrode is grown on the substrate by electron beam evaporation technology, and the thickness of Au is It is 100-150 nanometers, and then the excess part is peeled off by the glue removal solution, leaving the device pattern, and then the device is heated to 400 ° C and then cooled to age it, thereby making a SAW dual-mode temperature sensor (LGS surface acoustic wave temperature sensor).
[0031] Step 1. Use a high...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
Login to View More
Abstract
The invention belongs to the application field of surface acoustic wave sensors, in particular to a method for measuring and calculating linear temperature-frequency characteristics of an LGS surface acoustic wave temperature sensor. The present invention first calibrates the LGS surface acoustic wave temperature sensor to obtain the Rayleigh wave mode frequency and body wave mode frequency f at room temperature 01 , f 02 , the first-order temperature frequency coefficient x of the two modes 1 、x 2 , and then using the characteristics that the second-order temperature coefficients of the Rayleigh wave mode and the bulk wave mode of the same traditional LGS-based surface acoustic wave resonator are nearly equal and the environmental variables are exactly the same, the LGS surface acoustic wave temperature sensor is obtained through testing. The resonant frequency f of the Rayleigh wave mode and the bulk wave mode in the environment 1 and f 2 , into the formula to calculate the current temperature T. The invention expands the application range of the temperature test of the original sensor without increasing the device area and device complexity, and the differential frequency has excellent linear temperature characteristics.
Description
technical field [0001] The invention belongs to the application field of surface acoustic wave sensors, in particular to a method for measuring and calculating linear temperature-frequency characteristics of an LGS surface acoustic wave temperature sensor. Background technique [0002] SAW (Surface Acoustic Wave, Surface Acoustic Wave) temperature sensors are divided into delay type SAW temperature sensors and resonant type SAW temperature sensors. SAW resonators only respond to certain frequencies of radio frequency signals, including Rayleigh wave mode frequencies and bulk wave mode frequencies. If the temperature around the device changes, the resonant frequency of the Rayleigh wave mode and the resonant frequency of the bulk wave mode of the SAW resonator will change accordingly. By testing the resonant frequency of the Rayleigh wave mode or the resonant frequency of the bulk wave mode, according to the relationship between temperature and frequency , the size of the su...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/26G01K15/00
CPCG01K11/265G01K15/007
Inventor 彭斌喻恒张万里李凌张文旭
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA