Gravitational acceleration sensor

A gravitational acceleration and sensor technology, which is applied in the direction of instruments, scientific instruments, and gravitational field measurement, can solve the problems of long manufacturing cycle, low resolution of MEMS gravitational acceleration sensor, high manufacturing cost, etc., and achieve easy implementation, increased manufacturing difficulty, The effect of improving consistency

Active Publication Date: 2018-06-12
HUAZHONG UNIV OF SCI & TECH
View PDF12 Cites 10 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] For the defects of the prior art, the object of the present invention is to provide a micro-electromechanical acceleration of gravity sensor, which aims to solve the problems of high manufacturing cost and long manufacturing cyc

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Gravitational acceleration sensor
  • Gravitational acceleration sensor
  • Gravitational acceleration sensor

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0033] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0034] In view of the defects or improvement requirements of the existing gravity acceleration sensor, the present invention provides a method for using the same structure of the gravity sensor to adapt to the X, Y, and Z three-axis measurement environment, and its purpose is to realize the gravity sensor in the Z-axis direction. After overcoming the acceleration of gravity to produce an initial drooping displacement, the initial working state is consistent, which can realize high-precision and high-stability gravity measurement, while effectively limiting the production cost.

[0035] The adapt...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Resonant frequencyaaaaaaaaaa
Resolutionaaaaaaaaaa
Login to view more

Abstract

The invention discloses a gravitational acceleration sensor which comprises a spring mass block structure, a displacement sensing assembly, an upper cover plate structure and a lower cover plate structure. The spring mass block structure comprises a housing frame, an examining weight and a spring structure, and under constraint of the spring structure, the examining weight moves under the effect of an external force; the displacement sensing assembly comprises a driving period array pole plate and a picking period array pole plate, the position of the driving period array pole plate is opposite to that of the picking period array pole plate in an interlaced way, and a capacitor is formed; and when a gravitational acceleration component parallel to the direction of the driving period arraypole plate or the picking period array pole plate changes, the examining weight moves so that the area of the pole plates opposite to each other of the capacitor changes, the change quantity of the capacitor is detector to determine the change quality of the gravitational acceleration component in the direction, and when the gravitational acceleration sensor works in the direction of axis-Z, sagging displacement of the examining weight includes one or more array period(s) under the effect of the gravity. Thus, three-component gravity measurement can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement physics, and more specifically relates to a gravitational acceleration sensor. Background technique [0002] The gravity acceleration sensor is a precision gravity measurement sensor that measures small changes in the acceleration of gravity. The gravitational acceleration sensor is different from the acceleration sensor used for motion sensing in the consumer electronics field and vibration monitoring in the industrial control field. The fundamental difference lies in the different amplitudes of range, resolution, and bias stability. The range of the acceleration sensor used for motion sensing and vibration monitoring is generally 1-100g, the resolution is on the order of 1mg, and there is basically no requirement for the stability of the bias value; the range of the gravity acceleration sensor is generally on the order of 1mg, the resolution It is on the order of 1ng (about 1μGal,...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01V7/00
CPCG01V7/005
Inventor 刘骅锋涂良成徐小超饶康刘金全
Owner HUAZHONG UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap