Method for direct ink-jet printing of short channel electrodes

Abstract

The invention discloses a method for direct ink-jet printing of short channel electrodes. The method comprises the following steps: (1) two-drop printing: ink-jet printing two-point fusion rules are explored to obtain a drop gap d1 of two drops from separation to total fusion and a drop gap d2 of the two drops from shorter distance to longer distance; and (2) four-drop printing: (1) a drop gap parallel to a printing direction is set as Dm, and a drop gap perpendicular to the printing direction is set as Dn, so that a range of drop gaps of the short channel electrodes parallel to the printing direction is Dm larger than d1-10 and not larger than d1 and Dn larger than d2-11 and smaller than d2, and a range of drop gaps of the short channel electrodes perpendicular to the printing direction is Dm larger than d2-11 and smaller than d2 and Dn larger than d1-10 and not larger than d1; and (2) multi-set printing experiment screening is performed in the obtained ranges to obtain the shot channel electrodes. The method is simple, can be repeated, and can be used for array printing.

Description

technical field [0001] The invention relates to the field of preparation of printed electronic devices, in particular to a method for direct inkjet printing of short channel electrodes. Background technique [0002] In order to reduce the channel length, researchers have made many attempts on the basis of improving the printing conditions such as substrate surface energy, temperature and nozzle piezoelectric waveform: (1) by reducing the nozzle (Sekitani T, Noguchi Y, Zschieschang U, et al. Organic transistors manufactured using inkjet technology with subfemtoliter accuracy[J].PROCEEDINGS OF THE NATIONAL ACAD EMY OF SCIENCES OFTHE UNITED STATES OF AMERICA.2008,105(13):4976-4980.) or obtained by using inkjet printing technologies such as EHD and SIJ 1-10μm channel length (Park J U, Hardy M, Kang S J, et al.High-resolution electrohydrodynamic j et printing.[J].Nature Materials.2007,6(10):782-789; Murata K, Matsumoto J, Tezuka A, et al. Super-fine ink-jet printing: towards the...

AI Technical Summary

Problems solved by technology

[0002] In order to reduce the channel length, researchers have made many attempts on the basis of improving the printing conditions such as substrate surface energy, temperature and nozzle piezoelectric waveform: (1) by reducing the nozzle (Sekitani T, Noguchi Y, Zschieschang U, et al. Organic transistors manufactured using inkjet technology with subfemtoliter accuracy[J].PROCEEDINGS OF THE NATIONAL ACAD EMY OF SCIENCES OFTHE UNITED STATES OF AMERICA.2008,105(13):4976-4980.) or obtained by using inkjet printing technologies such as EHD and SIJ 1-10μm channel length (Park J U, Hardy M, Kang S J, et al.High-resolution electrohydrodynamic j et printing.[J].Nature Materials.2007,6(10):782-789; Murata K, Matsumoto J, Tezuka A, et al. Super-fine ink-jet printing: towards the minimal manufacturing system[J]. ), this method is based on the premise of sacrificing the printing flux, and the droplet ejection stability is not as good as the traditional piezoelectric inkjet printing technology, which puts forward higher requirements for materials; (2) print a single electrode, and then ablate the channel by laser (Ko S H, Chung J, Choi Y H, et al. Laser based hybrid inkjet printing of nanoink for flexible electronics[M]. Proceedings of SPIE, Fieret J, Herman P R, Okada T, et al, 2005:5713, 97-104 .), the disadvantage is that it is usually not suitable for electronic devices with multilayer structures; (3) substrate photolithographic patterning forms dams that constrain droplet spreading (] Mahajan A, Hyun W J, Walker S B, et al.High-Resolution, Hi gh-Aspect RatioConductive Wires Embedded in Plastic Substrates[J].ACS Applied Materials&Interfaces.2015,7(3):1841-1847.), sacrificing the direct patterning advantage of inkjet printing technology; Pre-patterning (UV treatment (Suzuki K, Yutani K, Nakashima M, et al. Fabrication of All-printed Organic TFT Array on Flexible Substrate[J].2011,24(5):565-570.), photolithography or Plasma etching PI layer (Sirringhaus H, Kawase T, Friend R H, et a l.High-resolution inkjet printing of all-polymer transistor circuits.[J].MRS Bulletin.2001,290(7(Emerging Methods for Micro- and Nano-Fabrication Nanofabrication)):2123-2126.)), sacrificing the advantages of direct patterning of inkjet printing technology; (5) using the "coffee ring" effect to form adjacent thin lines (Bromberg V, Ma S, Singler T J .High-resolution inkj et printing of electrically conducting lines of silver nanoparticles by edge-enhanced twin-line deposition[J].Applied Physics Letters.2013,102(21):214101.), the disadvantage is that inkjet printing ink, substrate and the printing environment put forward certain requirements; (6) self-assembled monolayers using fluoride (deposition of CF 4 , plasma, or adding surfactants to reduce the surface energy of the first droplet) to treat the first droplet of ink so that it repels each other with the second droplet of ink to cause sliding, and self-aligns to form a 100nm-scale submicron channel (Noh Y Y, Zhao N, Caironi M, et al. Downscaling of self-aligned, all-printed polymer thin-film transistors [J]. Nature Nanotechnology. 2007, 2(12): 784-789; Sele C W, von Werne T, Friend R H, etal. Lithography-free, self-aligned inkjet printing with sub-hundred-nanometer resolution[J].AD VANCED MATERIALS.2005,17(8):997.); (7) Doggart et al. The hydrophobic boundary residue caused by the retraction of the first electrode was pre-printed on the substrate, and the second electrode was self-aligned to form short channels down to 10 μm (Doggart J, Wu Y, Liu P, et al. Facile Inkjet-Printing Self- Aligned Electrodes for Organic Thin-Film Transistor Arrays with Small and UniformChannel Length[J].ACS APPLIED MATERIALS&INTERFACES.2010,2(8):2189-2192.); (6), (7) Although the method is simple, it still needs Surface modification or request for hydrophilicity and hydrophobicity of the substrate and the material itself

Images