A kind of self-healing coating and its preparation method and application
A self-healing and coating technology, applied in coating, metal material coating process, vacuum evaporation coating and other directions, can solve the problems of irreparable, failure, service life reduction, etc., to improve service life and reliability, The effect of good microcrack self-healing function
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[0037] Another aspect of the embodiments of the present invention also provides the aforementioned method for preparing the self-healing coating, which includes:
[0038] A soft metal-doped cermet coating and a metal coating are alternately deposited on a substrate by using a physical vapor deposition technique and / or a chemical vapor deposition technique, thereby forming a self-healing coating, the soft metal-doped cermet coating Layer materials include Me 1 -X-C / N-Me 2 , where Me 1 For transition metal elements, X includes Al, Si or B, Me 2 For soft metal elements.
[0039] In some embodiments, the preparation method specifically includes:
[0040] (1) Provide substrate;
[0041] (2) Deposit and form a soft metal-doped cermet coating on the substrate;
[0042] (3) depositing and forming a metal coating on the soft metal-doped cermet coating formed in step (2);
[0043] (4) Steps (2) to (3) are repeated until a self-healing coating is formed, and the top layer of the s...
Embodiment 1
[0071] In this embodiment, the base material is a stainless steel sheet, and a TiSiNAg / Ag self-healing coating is prepared on the surface of the base material, and the preparation method comprises the following steps:
[0072] (1) Send the substrate into the vacuum chamber, and the vacuum degree of the background is 3×10 -3 Pa, heating temperature to 450°C.
[0073] (2) The TiSi composite target and the pure Ag target were cleaned by sputtering with inert gas argon.
[0074] (3) Carry out the following preparation process A on the substrate surface:
[0075] Process A: Deposit TiSiNAg composite coating with a coating thickness of 100nm. The specific deposition process is: using multi-arc ion plating technology, using titanium-silicon composite target and pure Ag target, the reaction gas is high-purity nitrogen, and the coating is deposited and prepared. During the process, the coating pressure is 0.5Pa, the TiSi target current is 65A, and the substrate bias is 50V;
[0076]...
Embodiment 2
[0081] In this embodiment, the substrate is a stainless steel sheet, and a TiSiNAg / Ag self-healing coating is prepared on the surface of the substrate. The preparation method includes the following steps:
[0082] (1) is completely consistent with step (1) in Example 1.
[0083] (2) is completely consistent with step (2) in Example 1.
[0084] (3) Carry out the following preparation process A on the substrate surface:
[0085] Process A: Deposit TiSiNAg composite coating with a coating thickness of 100nm. The specific deposition process is: using multi-arc ion plating technology, using titanium-silicon composite target and pure Ag target, the reaction gas is high-purity nitrogen, and the coating is deposited and prepared. During the process, the coating pressure is 0.5Pa, the TiSi target current is 65A, and the substrate bias is 50V;
[0086] Then, deposit a pure Ag coating with a coating thickness of 5nm. The specific deposition process is as follows: using multi-arc ion pl...
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