A six-degree-of-freedom low-frequency vibration active-passive isolation mechanical device

Abstract

The invention discloses a six-degree-of-freedom low-frequency active and passive vibration isolation mechanical device which comprises an objective table, a vibration isolation unit and a base; the objective table comprises a fixing plate, three upper connecting blocks and knuckle bearing supports; the three upper connecting blocks are circumferentially and uniformly arranged below the fixing plate; each upper connecting block is connected with two knuckle bearing supports; components of the base and the connection forms of the components of the base are identical with those of the objective table; the two ends of the vibration isolation unit are connected with one knuckle bearing support of the objective table and one knuckle bearing support of the base correspondingly; a passive vibration isolation part of the vibration isolation unit comprises a T-shaped block, a supporting spring, a two-force rod, levers and transverse springs; an active vibration isolation part of the vibration isolation unit comprises acceleration sensors, motor-driven rods, motor mounting barrels, coils, magnet systems and an external drive control system. The acceleration sensors are fixedly arranged at oneends of the motor-driven rods, and after signals, acting as the negative feedback integral, of the acceleration sensors, are amplified, motor force is obtained. The problem of selection contradictionbetween a high-frequency damping coefficient and a low-frequency damping coefficient in passive vibration isolation is effectively solved, the six-degree-of-freedom low-frequency active and passive vibration isolation mechanical device is simple in structure, the number of parts is small, and machining manufacture is facilitated.

Description

technical field [0001] The invention belongs to the technical field of mechanical equipment vibration control, and in particular relates to a six-degree-of-freedom low-frequency vibration active and passive isolation mechanical device. Background technique [0002] With the increasing demand for precision measurement and precision machining technologies in modern industry and manufacturing, the requirements for broadband vibration isolation of measurement and processing equipment are also gradually increasing. Research has found that vibrations in the range of 0.5 to 70 Hz can cause harm to precision equipment, so mechanical devices with the ability to isolate low-frequency vibrations are needed to ensure the normal operation of precision equipment. Compared with the active vibration isolation device, the traditional passive vibration isolation device has the advantages of simple structure and high technical maturity, but it is difficult to meet the two requirements of high ...

AI Technical Summary

Problems solved by technology

Compared with the active vibration isolation device, the traditional passive vibration isolation device has the advantages of simple structure and high technical maturity, but it is difficult to meet the two requirements of high load and low frequency vibration isolation of the vibration isolation device at the same time, and because the damping coefficient varies between high frequency and The contradiction between the selection of low frequency will limit the vibration isolation level of the vibration isolation mechanism in the whole working frequency band

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