Integrated circuit production line equipment constant monitoring method
A technology for integrated circuits and production lines, applied in the field of constant monitoring of equipment in integrated circuit production lines, can solve problems such as high difficulty, low efficiency, and increased maintenance difficulty, and achieve the effect of strong scalability and real-time performance.
Inactive Publication Date: 2018-06-15
MICROCYBER CORP
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Problems solved by technology
[0002] In the integrated circuit production line equipment management system, it is necessary to monitor and manage equipment constants for all equipment on the production line. The current status of this field and the existing problem are that the equipment constants are monitored and managed by equipment engineers in the local control system of the equipment. Inquire regularly, but in the whole production line, there will be a wide variety of equipment, large differences in equipment constants, difficult operation and monitoring, etc.
The above method requires each equipment manufacturer to regularly assign equipment engineers to carry out maintenance on site. It is difficult to implement and the efficiency is low. These problems are also technical problems that we need to solve
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[0023] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0024] Such as figure 1 Shown is the flow chart of equipment constant monitoring in the present invention.
[0025] A method for monitoring device constants on an integrated circuit production line, comprising a device constant configuration file, characterized in that all device constant information is stored in the device constant configuration file, and the device constant information includes: data number, data name, data Type, data range, and data exception prompt information.
[0026] The described device constant monitoring method comprises the following steps:
[0027] Step 1: Configure the device constant data file to form a device constant data configuration file;
[0028] Step 2: Obtain the path of the device constant data configuration file, and judge whether the device constant data configuration file can be read according to t...
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The invention relates to an integrated circuit production line equipment constant monitoring method. An equipment constant data file is configured, and the equipment constant data configuration file is formed; a path of the equipment constant data configuration file is acquired, whether the equipment constant data configuration file can be read according to the path is determined, and the equipment constant information of the equipment constant data configuration file is read and is stored in a memory; the real-time equipment constant information is correspondingly read according to the equipment constant information content, real-time equipment constant data is compared with the equipment constant information of the equipment constant data configuration file, inspection and verification are carried out, and the information is stored to a server. The method is advantaged in that equipment constants are utilized for file configuration, the corresponding equipment constant data is read from equipment in real time, scope verification of the read equipment constant data is carried out, whether the equipment constant data is abnormal can be monitored in real time, and strong practicality and expansibility are realized.
Description
technical field [0001] The invention relates to a method for monitoring equipment constants, in particular to a method for monitoring equipment constants of an integrated circuit production line. Background technique [0002] In the integrated circuit production line equipment management system, it is necessary to monitor and manage equipment constants for all equipment on the production line. The current status of this field and the existing problem are that the equipment constants are monitored and managed by equipment engineers in the local control system of the equipment. However, in the entire production line, there will be a wide variety of equipment, large differences in equipment constants, and difficult operation and monitoring. The above method requires each equipment manufacturer to regularly assign equipment engineers to carry out maintenance on site. It is difficult to implement and the efficiency is low. These problems are also technical problems that we need ...
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IPC IPC(8): G05B19/418
CPCG05B19/4183Y02P90/02
Inventor 曹阳祁峰杨娇姚呈呈闫洪旭白媛姬小兵徐增利王晶张丽丽
Owner MICROCYBER CORP