Single freedom degree large-stroke nanometer displacement positioning platform based on flexure hinges

Abstract

The invention provides a single freedom degree large-stroke nanometer displacement positioning platform based on flexure hinges. The single freedom degree large-stroke nanometer displacement positioning platform based on the flexure hinges includes a platform main body, wherein the four flexure hinges are arranged on the platform main body, and the platform main body is divided into four parts bythe four hinges, specifically, the area A, the area B, the area C and the area D. The area A is a mobile area, the area B and the area C are stress deformation areas, and the area D is a fixed area. Aleft blind hole and a right blind hole are formed in the two ends of the platform main body, the bottom portion of the left blind hole is a smooth circular cone surface, and a spring pretightening assembly is installed in the left blind hole. The bottom portion of the right blind hole is also a smooth circular cone surface, and a piezoceramic assembly is installed in the right blind hole. The spring pretightening assembly and the piezoceramic assembly constitute an amplifying mechanism. A relatively large vertical displacement under the condition of a small vertical platform size is achieved,and the demand for a large vertical stroke with a small space occasion can be satisfied.

Description

Technical field [0001] The invention is a nano-displacement positioning platform that can realize a large vertical displacement stroke, and ensures that the vertical dimension is small, so as to meet the actual use occasions with small vertical space. Background technique [0002] Nano-positioning platform is used to generate nano-level displacement and realize nano-level positioning control. It is mainly used in high-tech industries such as atomic force microscopes, precision optical equipment, and semiconductor equipment. The development of advanced semiconductor chip manufacturing technology and large-scale memory manufacturing technology has pushed nano-displacement and nano-positioning technology to a new level. Precision measurement and inspection technology is considered to be the technical bottleneck that the next generation of semiconductor chip manufacturing technology and large-scale memory manufacturing technology must break through. Metrology and detection based on ...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a single-degree-of-freedom large-stroke nano-displacement positioning platform and method based on flexible hinges, so as to solve the aforementioned problems in the prior art

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