Moving platform for OLED detecting equipment

A motion platform and detection equipment technology, applied in the field of motion platforms, can solve problems such as poor characteristics and slow dynamic response

Pending Publication Date: 2018-06-29
无锡星微科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the shortcomings of slow dynamic response and poor characteristics in the prior art, and propose a motion platform for OLED detection equipment

Method used

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  • Moving platform for OLED detecting equipment
  • Moving platform for OLED detecting equipment
  • Moving platform for OLED detecting equipment

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Embodiment Construction

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0028] refer to Figure 1-4 , a motion platform for OLED testing equipment, the platform includes from top to bottom: vacuum suction cup 18, Z-direction fine-tuning table, XY-direction mobile table, marble base 1, XY-direction mobile table consists of three sets of independent Y1 permanent magnet linear motor 3, Y2 permanent magnet linear motor 10 and X permanent magnet linear motor 6 are parallel in the Y direction. On the marble base 1, the mover of the Y1 permanent magnet linear motor 3 is connected to the Y1 permanent magnet linear motor mover connector on the Y1 mechanical guide rail 2 on this side, and the stator of the Y2 permanent magnet linear motor 10 is in...

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Abstract

The invention relates to the technical field of moving platforms, in particular to a moving platform for OLED detecting equipment. The platform sequentially comprises a vacuum chuck, a Z-direction fine adjustment table, an XY-direction moving table and a marble pedestal from top to bottom. One side of a Y1 permanent magnet linear motor and one side of a Y2 permanent magnet linear motor are each provided with a Y-direction mechanical buffer. One side of an X permanent magnet linear motor is provided with an X-direction mechanical buffer. The Z-direction fine adjustment table comprises a Z-direction permanent magnet linear motor, a Z-direction mechanism, a Z-direction balance spring and a Z-direction carrying table. A wedge-shaped block is arranged on one side of the Z-direction carrying table, the Z-direction fine adjustment table is provided with a flexible elastic sheet, vertical-direction mechanism design is simplified, and straightness errors in the Z-axis moving process are reduced. The moving platform can guarantee the vertical accuracy of a carrying table top in the XY overall moving process, the flatness error of the carrying table in the detecting journey range needs to besmaller than 1 micron, and the moving platform has the characteristics of compactness, precision and high response.

Description

technical field [0001] The invention relates to the technical field of motion platforms, in particular to a motion platform for OLED detection equipment. Background technique [0002] The motion platform of testing equipment is a large-stroke, high-precision platform. This series of platforms is a complex system integrating precision machinery, high-precision measurement, motion control and other technologies. The motion platform can decompose a large-area object to be detected into multiple parts. The accumulative detection of multiple fields of view, through the control of the motion platform to complete the large-area detection of OLED panels, the positioning accuracy, flatness error and uniformity of operation of the platform determine the detection accuracy of the equipment, and the stepping and operating speed determine the productivity of the equipment. [0003] The existing technology adopts a driving method that uses mechanical guide rails and permanent magnet linea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25H1/10B25H1/14
CPCB25H1/10B25H1/14
Inventor 陆敏杰
Owner 无锡星微科技有限公司
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