Mask frame assembly and manufacturing method thereof

A manufacturing method and frame technology, which are used in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve the problem of cost increase, mask folds and warping, and relative positions of support strips and shield strips to the mask. Inability to adjust and other problems to achieve the effect of reducing production costs

Active Publication Date: 2018-07-06
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Embodiments of the present invention provide a mask integration frame and its manufacturing method, which can solve the problem of wrinkling, warping, replacement or repair of the mask sheet caused by the offset of the relative positions of the support bar

Method used

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  • Mask frame assembly and manufacturing method thereof
  • Mask frame assembly and manufacturing method thereof
  • Mask frame assembly and manufacturing method thereof

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Embodiment Construction

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0038] An embodiment of the present invention provides a mask integration frame, as shown in FIG. The frame 101 and the second frame 102 are fixedly connected by sheathing; it also includes a plurality of mask sheets 301, as shown in FIG. The opposite ends of the mask sheet 301 are fixed on the first frame 101; the shielding strip 201 and / or the supporting strip 202, as shown in FIG. 2( a), the shielding strip 201 and / or the supporting strip 202 straddle the s...

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PUM

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Abstract

The embodiment of the invention provides a mask frame assembly and a manufacturing method thereof, and relates to the technical field of evaporation. The problems that in the prior art, mask sheets are wrinkled and warped, howling strips and cover strips are replaced or repaired, consequently, cost is increased, the relative positions of the howling strips, the cover strips and the mask sheets cannot be adjusted, and a mask frame assembly cannot be cleaned up can be solved. The mask frame assembly comprises a first frame, a second frame, multiple mask sheets and cover strips and/or howling strips. The first frame and the second frame are each provided with a hollow area and are fixedly connected in a sleeved manner. The multiple mask sheets are sequentially arranged on the hollow area of the first frame in a crossing manner, and the two opposite ends of each mask sheet are fixed to the first frame. The cover strips and/or howling strips are arranged on the hollow area of the second frame in a crossing manner, and the two opposite ends of each cover strip and/or howling strip are fixed to the second frame. The cover strips are located at the clearance positions between the adjacentmask sheets, and the howling strips cross over invalid mask areas of the multiple mask sheets so as to support the multiple mask sheets.

Description

technical field [0001] The invention relates to the field of vapor deposition technology, in particular to a mask integrated frame and a manufacturing method thereof. Background technique [0002] Currently, the OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) display panel has been more and more widely used due to its advantages of self-illumination, fast response, high brightness, and thinness. [0003] Wherein, the light-emitting layer in the OLED display panel can be formed by using a fine metal mask (Fine Metal Mask, FMM for short) and through an evaporation process. The fine metal mask board includes a plurality of mask sheets (FMM Sheet), and the mask sheet is provided with a mask pattern. During the evaporation process, multiple mask sheets need to be welded on the frame (Frame) to make a mask. Membrane integration framework (Mask Frame Assembly, MFA) to use. The mask integration frame may further include cover bars arranged between adjacent mask s...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/00
Inventor 罗昶吴建鹏
Owner BOE TECH GRP CO LTD
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