A cooling structure and potential distribution method of a high-voltage multi-stage accelerating electrode

Abstract

The invention relates to a cooling structure and a potential distribution method of a high-voltage multi-stage accelerating electrode. Each accelerating electrode assembly is composed of a hollow accelerating electrode and a cooling joint; the cavity of the accelerating electrode is a cooling medium passage; and the adjacent accelerating electrode assemblies are connected in series by an insulating cooling pipeline. After a cooling medium flows into the structure from the cooling joint of the accelerating electrode assembly at one end, the cooling medium flows through all accelerating electrodes and insulating cooling pipelines successively and then flows out of the cooling joint of the accelerating electrode assembly at the other end. Therefore, the accelerating electrodes can be cooled effectively; the insulating cooling pipelines between the accelerating electrodes can be used for replacing the high voltage resistors for potential distribution; installation becomes convenient; and the structure of the high-voltage multi-stage accelerating electrode is simplified.

Description

technical field [0001] The invention belongs to the technical field of high-voltage accelerators, and in particular relates to a cooling structure and potential distribution method of high-voltage multi-stage accelerating electrodes. Background technique [0002] In high-voltage accelerators and ion implanters, in order to increase ion energy, it is often achieved by connecting multiple accelerating electrodes in series. During the process of beam acceleration, the stray ions and electrons generated by the collision with the vacuum residual gas will hit the electrode and cause the electrode to heat up. Electrode heating becomes more serious as the beam intensity increases. For high-current low-energy accelerators, if these electrodes are not cooled, it is very easy to cause damage to the accelerating electrodes or even the entire accelerator. The electrodes in the high-voltage multi-stage acceleration mode are at different potentials, and the cooling water must use specifi...

AI Technical Summary

Problems solved by technology

For high-current low-energy accelerators, if these electrodes are not cooled, it is easy to cause damage to the accelerating electrodes or even the entire accelerator

The electrodes in the high-voltage multi-stage acceleration mode are at different potentials, and the cooling water must use specific water resistances when entering and leaving different potentials. Cooling different electrodes one by one will make the water-cooling structure of the entire high-voltage multi-stage acceleration structure more complicated. It will take up more space

Images