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Ultrashort distance laser detection device for atomic force microscope

An atomic force microscope and laser detection technology, applied in the direction of scanning probe technology, instruments, etc., can solve the problems that the structure cannot be accurately positioned by the high-power optical objective lens, inconvenient to use, etc., and achieve the effect of solving the problem of inaccurate positioning and convenient operability

Pending Publication Date: 2018-07-24
苏州飞时曼精密仪器有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies in the prior art, the purpose of the present invention is to provide an ultra-short-distance laser detection device for an atomic force microscope to solve the problem that the existing laser detection scanning head cannot use a high-power optical objective lens for precise positioning due to structural limitations. , Inconvenient use, etc.

Method used

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  • Ultrashort distance laser detection device for atomic force microscope
  • Ultrashort distance laser detection device for atomic force microscope
  • Ultrashort distance laser detection device for atomic force microscope

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Embodiment approach

[0059] As an embodiment of the present invention, the position detector 241 passes through the position detector X slider 242 and the position detector Y slider 243, and is fixed to the position detector X slider. Block 242.

[0060] The adjustment screws of the position detector X slider 242 and the position detector Y slider 243 pass through the third cavity 213, and are connected to the third cavity 213 through the adjustment screw. The adjustment screw controls the movement of the position detector 241 by controlling the movement of the position detector X slider 242 and the position detector Y slider 243.

[0061] The first cavity 211 is provided with a beam structure at an angle of 45° with the cover 29. A left mirror 25 is fixed on the beam structure, and the left mirror 25 is used to reflect the laser beam 221 emitted. laser.

[0062] The third cavity 213 is provided with a beam structure at an angle of 45° with the cover 29, and a right reflector 26 is fixed on the beam st...

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Abstract

The invention discloses an ultrashort distance laser detection device for an atomic force microscope. The ultrashort distance laser detection device for the atomic force microscope comprises an optical objective lens component and a laser detection head arranged under the optical objective lens component; the laser detection head comprises an internally hollow casing body, a laser component, a probe frame component and a position detector component; the laser component, the probe frame component and the position detector component are arranged in the inner part of the casing body; the opticalobjective lens component comprises an objective lens turntable and a plurality of objective lenses with different magnification times, the objective lenses are peripherally distributed on the objective lens turntable, and the magnification time of the objective lens is 4-100 times. The ultrashort distance laser detection device for the atomic force microscope has the beneficial effects that the problem of inaccurate positioning of the low-power objective lens of the existing device is thoroughly solved, the magnification time and the optical view can be freely switched according to the actualcondition of a sample, the operability of the atomic force microscope is greatly facilitated, and a to-be-detected sample area is also easily found.

Description

Technical field [0001] The invention relates to the field of precision measuring instruments, in particular to an atomic force microscope ultra-short-distance laser detection device. Background technique [0002] Atomic force microscopy studies the surface structure and properties of substances by detecting the extremely weak interatomic interaction between the surface of the sample to be tested and a miniature force-sensitive element. Fix one end of a pair of micro cantilever that is extremely sensitive to force, and the micro needle tip at the other end is close to the sample. At this time, the needle tip will interact with the sample, and the force will cause the micro cantilever to deform or change its motion state. In order to obtain information on the surface of the sample, a laser inspection method is generally used, and this corresponding device is also called a laser inspection scanning head. The laser beam hits the back of the probe cantilever and is reflected on the p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q30/02
CPCG01Q30/02
Inventor 韩雄都有为钱锋王矛宏王辰成
Owner 苏州飞时曼精密仪器有限公司