Silicon wafer sorting machine
A technology for sorting machines and silicon wafers, which is applied in the fields of electrical components, semiconductor/solid-state device manufacturing, semiconductor/solid-state device testing/measurement, etc. It can solve the problems of low production efficiency and achieve the effect of improving production efficiency
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[0052] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0053] An embodiment of the present invention provides a silicon wafer sorting machine, the silicon wafer sorting machine includes a conveying line, and the silicon wafer sorting machine also includes a dimension detection device, a hidden crack detection device, a dirt detection device, and a thickness detection device , At least two of the P / N type detection devices, wherein:
[0054] Outline dimension detection device, used to detect whether the outline dimension of the silicon wafer conveyed on the conveying line is qualified;
[0055] The crack detection device is used to detect whether there are cracks on the silicon wafer;
[0056] A dirt detection device, used to detect whether there is dirt on the surface of the silicon wafer...
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