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Processing device

A technology for processing devices and processed objects, applied in measuring devices, using optical devices, transportation and packaging, etc., can solve the problems of labor required for installation, failure to identify and maintain workbenches and transfer units, etc.

Active Publication Date: 2021-06-29
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, when the sensor fails, there is a problem that the position of the holding table and the transfer unit cannot be recognized
In addition, in the case of using a sensor, it is necessary to install the sensor and the cable for the sensor, and to convert the input voltage from the sensor into a signal that the computer can recognize. The labor problem

Method used

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Examples

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Embodiment Construction

[0021] figure 1 The cutting device 1 shown is an example of the processing device of the present invention, which holds a workpiece on a holding table 10 and cuts the workpiece by a cutting unit 11 as a processing unit. The cutting unit 11 is arranged inside the housing 20 .

[0022] Such as figure 2 As shown, the holding table 10 has: an adsorption part 100, which is composed of a porous member that adsorbs the workpiece; a frame 101, which supports the adsorption part 100; a cover 102, which is arranged on the adsorption part 100 and Around the frame body 101; the rotating unit 103, which is connected to the bottom surface side of the adsorption part, and rotates the adsorption part 100 and the frame body 101; indivual. The suction unit 100 communicates with a suction source (not shown), and suction-holds a workpiece on a holding surface 100 a that is an exposed surface of the suction unit 100 .

[0023] On the upper surface of the cover 102 constituting the holding tab...

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PUM

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Abstract

Provided is a processing device capable of recognizing the positions of a holding table and a transfer unit without using a sensor. There is a first light-emitting part (21) on the holding table (10), and there is a second light-emitting part (22a, 22b) on the transfer pad (254, 264), for the first light-emitting part (21) and the second light-emitting part The parts (22a, 22b) take pictures to recognize their positions, thereby judging whether the holding table (10) and the transfer pad (254, 264) are located at the transfer position (10a).

Description

technical field [0001] The present invention relates to a processing device including: a holding table that holds a workpiece; and a transfer unit that transfers the workpiece to the holding table. Background technique [0002] For example, in a processing device such as a cutting device, the processing of the workpiece is started after the conveying unit conveys the held workpiece to the holding table, and after the processing is completed, the conveying unit completes the processing. The processed objects are moved out from the holding table. [0003] When transferring the workpiece between the transfer unit and the holding table in this way, it is necessary to position the holding table and the transfer unit at predetermined transfer positions. Therefore, in order to determine whether the holding table and the transfer unit are located at predetermined transfer positions, the positions of the holding table and the transfer unit are recognized by sensors (for example, ref...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00B65G47/91
CPCG01B11/00H01L21/67092H01L21/67259H01L21/6773
Inventor 根岸克治
Owner DISCO CORP