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Mask device, manufacturing method of mask device and evaporation system

A production method and mask technology, which are applied in vacuum evaporation plating, devices for coating liquid on surfaces, sputtering plating, etc. It can avoid problems such as material waste of shape alignment plate, and achieve the effect of avoiding difficulties, avoiding changes, and avoiding waste.

Active Publication Date: 2018-08-24
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At the intersection of the strip-shaped alignment plate and the strip-shaped support plate, the strip-shaped alignment plate will cover part of the solder joints of the strip-shaped support plate. When the solder joints need to be repaired, the strip-shaped alignment plate needs to be torn off first. Lead to waste of strip alignment plate material
In addition, re-welding the strip alignment plate will cause the alignment reference of the strip alignment plate to change, which will bring difficulties to the subsequent alignment work

Method used

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  • Mask device, manufacturing method of mask device and evaporation system
  • Mask device, manufacturing method of mask device and evaporation system
  • Mask device, manufacturing method of mask device and evaporation system

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Embodiment Construction

[0035] In order for those skilled in the art to better understand the technical solution of the present invention, the mask device provided by the present invention and its manufacturing method will be described in detail below with reference to the accompanying drawings.

[0036] see figure 1 , the existing mask device includes a frame 11 , a strip-shaped alignment plate 13 and a strip-shaped support plate 12 , wherein the strip-shaped support plate 12 is welded on the frame 11 first. The strip alignment plate 13 is welded on the frame 11 afterward. Moreover, the strip alignment plate 13 and the strip support plate 12 cross each other, and are welded to the frame 11 through a plurality of welding spots 121 . The strip-shaped support plate 12 is used to support a strip-shaped mask plate (not shown in the figure) containing effective evaporation openings. Moreover, a positioning hole 131 is provided on the strip alignment plate 13 for aligning with the positioning mark on the...

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Abstract

The invention provides a mask device, a manufacturing method of the mask device and an evaporation system. The mask device comprises a frame, a strip-shaped alignment plate and a strip-shaped supporting plate, a hollow part is arranged in the strip-shaped alignment plate, and the strip-shaped alignment plate is fixed to the frame; and the strip-shaped supporting plate and the strip-shaped alignment plate are crossed, and multiple welding points are arranged on the surface, opposite to the frame, of the strip-shaped supporting plate. By means of the mask device, the manufacturing method of themask device and the evaporation system, waste of materials of the strip-shaped alignment plate and difficulty of follow-up alignment work can be avoided.

Description

technical field [0001] The invention relates to the field of mask plate manufacturing, in particular to a mask device, a manufacturing method thereof, and an evaporation system. Background technique [0002] At present, a core technology for preparing high-quality OLED screens is to use high-precision OLED masks to vapor-deposit organic materials with three primary colors of R, G, and B on glass substrates. The quality of the mask plate used in the evaporation process directly affects the quality of the OLED screen. Therefore, the structure and manufacturing method of the mask plate are very important. [0003] The existing mask plate includes a frame, a strip-shaped alignment plate and a strip-shaped support plate, wherein the strip-shaped support plate is welded on the frame to support the strip-shaped mask plate; the strip-shaped alignment plate is welded on the frame, And it intersects with the strip-shaped support plate, and is used for aligning with the glass substrat...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/00H10K59/35H10K71/166B05C21/005B05D1/60C03C17/28C03C2218/151C03C2218/34
Inventor 吕守华黄俊杰张德赵蓉
Owner BOE TECH GRP CO LTD
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