Mask device, manufacturing method thereof, and vapor deposition system

A production method and mask technology, which are applied in vacuum evaporation plating, devices for coating liquid on surfaces, sputtering plating, etc. Problems such as waste, difficulty in alignment work, etc., to achieve the effect of avoiding changes, avoiding difficulties, and avoiding waste

Active Publication Date: 2020-03-13
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At the intersection of the strip-shaped alignment plate and the strip-shaped support plate, the strip-shaped alignment plate will cover part of the solder joints of the strip-shaped support plate. When the solder joints need to be repaired, the strip-shaped alignment plate needs to be torn off first. Lead to waste of strip alignment plate material
In addition, re-welding the strip alignment plate will cause the alignment reference of the strip alignment plate to change, which will bring difficulties to the subsequent alignment work

Method used

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  • Mask device, manufacturing method thereof, and vapor deposition system
  • Mask device, manufacturing method thereof, and vapor deposition system
  • Mask device, manufacturing method thereof, and vapor deposition system

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Embodiment Construction

[0035] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the mask device and the manufacturing method thereof provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0036] See figure 1 The existing mask device includes a frame 11, a strip-shaped alignment plate 13 and a strip-shaped support plate 12, wherein the strip-shaped support plate 12 is welded to the frame 11 first. The strip-shaped alignment plate 13 is then welded to the frame 11. In addition, the strip-shaped alignment plate 13 and the strip-shaped support plate 12 cross each other, and are welded to the frame 11 through a plurality of welding points 121. The strip support plate 12 is used to support a strip mask (not shown in the figure) with effective evaporation openings. In addition, positioning holes 131 are provided on the strip-shaped positioning plate 13 for positioning with positioning ...

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Abstract

The invention provides a mask device and its manufacturing method, and an evaporation system. The mask device includes a frame, a strip-shaped alignment plate and a strip-shaped support plate. The alignment plate is fixed on the frame; the strip support plate and the strip alignment plate cross each other, and a plurality of welding spots are arranged on the surface of the strip support plate opposite to the frame. The mask device, its manufacturing method, and the technical solution of the vapor deposition system provided by the present invention can avoid the waste of strip-shaped alignment plate materials and bring difficulties to subsequent alignment work.

Description

Technical field [0001] The invention relates to the field of mask plate manufacturing, in particular, to a mask device, a manufacturing method thereof, and an evaporation system. Background technique [0002] At present, a core technology for preparing high-quality OLED screens is to use high-precision OLED masks to vapor-deposit organic materials of the three primary colors of R, G, and B on a glass substrate. The quality of the mask used in the evaporation process directly affects the quality of the OLED screen. Therefore, the structure and manufacturing method of the mask are very important. [0003] The existing mask plate includes a frame, a strip-shaped alignment plate, and a strip-shaped support plate. The strip-shaped support plate is welded to the frame to support the strip-shaped mask plate; the strip-shaped alignment plate is welded to the frame, And it intersects with the strip-shaped support plate for alignment with the glass substrate. The existing masks inevitably ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/00H10K59/35H10K71/166B05C21/005B05D1/60C03C17/28C03C2218/151C03C2218/34
Inventor 吕守华黄俊杰张德赵蓉
Owner BOE TECH GRP CO LTD
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