Magnetic sensor and method of manufacturing the same

A magnetic sensor and magnetic field sensing technology, applied in the field of yoke construction, can solve problems such as unfavorable accuracy

Active Publication Date: 2018-08-28
TDK CORPARATION
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, such a plating process is disadvantageous in ensuring the accuracy of plating formation

Method used

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  • Magnetic sensor and method of manufacturing the same
  • Magnetic sensor and method of manufacturing the same
  • Magnetic sensor and method of manufacturing the same

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Embodiment Construction

[0034] Hereinafter, some embodiments of the present invention will be described with reference to the accompanying drawings. figure 1 is a partial sectional view of the magnetic sensor according to the first embodiment of the present invention. The magnetic sensor 1 has a plurality of magnetic field detection elements and a plurality of yokes. The yoke guides magnetic flux in a magnetic field sensing direction of the magnetic field detection element, and the magnetic flux guided by the yoke in the magnetic field sensing direction is detected by the magnetic field detection element. The magnetic field detection elements are interconnected by a bridge circuit (not shown) or the like, and thus the magnetic sensor 1 can measure an external magnetic field. figure 1 Shown is a magnetic sensor 1 comprising first and second magnetic field detection elements 21 , 22 adjacent to each other and first to third yokes 23 , 24 , 25 arranged near the magnetic field detection elements 21 , 22...

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Abstract

A magnetic sensor that is easy to ensure the height of the yoke and that is also easy to guide magnetic flux in the direction in which the magnetic field sensing film detects a magnetic field is provided. The magnetic sensor includes first magnetic field detection element 21 that has first magnetic field sensing film 38 that detects a magnetic field in first direction X, and first yoke 23 that includes first portion 23a that is located on a side of first magnetic field sensing film 38 with respect to first direction X, and second portion 23b that is in contact with first portion 23a in direction Z that is orthogonal to first direction X. The average dimension of second portion 23b in first direction X is larger than the average dimension of first portion 23a in first direction X.

Description

technical field [0001] The present invention relates to a magnetic sensor and a method of manufacturing the same, in particular, to the configuration of a magnetic yoke of the magnetic sensor. Background technique [0002] In order to guide magnetic flux in the magnetic field sensing direction of the magnetic field sensing film, the magnetic sensor may be provided with a yoke near the magnetic field sensing film. JP2013-172040A, JP2015-94732A and WO2011 / 68146 disclose a magnetic sensor in which a yoke is arranged near a magnetic field sensing film that detects a magnetic field in a first direction. The yoke extends in a second direction orthogonal to the first direction. The magnetic flux emitted from the end of the yoke has a component in the first direction, and the magnetic field sensing film detects the component in the first direction. A plurality of magnetic field sensing films are formed in the first direction, and the yokes and the magnetic field sensing films are ...

Claims

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Application Information

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IPC IPC(8): H01L43/00H01L43/12
CPCH10N50/00H10N50/01G01R33/0052G01R33/05G01R33/093H01R43/12
Inventor 太田尚城高杉圭祐
Owner TDK CORPARATION
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