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Magnetic sensor and manufacturing method thereof

A magnetic sensor and magnetic field sensing technology, applied in the field of yoke construction, can solve problems such as unfavorable accuracy

Active Publication Date: 2022-03-22
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, such a plating process is disadvantageous in ensuring the accuracy of plating formation

Method used

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  • Magnetic sensor and manufacturing method thereof
  • Magnetic sensor and manufacturing method thereof
  • Magnetic sensor and manufacturing method thereof

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Embodiment Construction

[0034] Hereinafter, some embodiments of the present invention will be described with reference to the accompanying drawings. figure 1 is a partial sectional view of the magnetic sensor according to the first embodiment of the present invention. The magnetic sensor 1 has a plurality of magnetic field detection elements and a plurality of yokes. The yoke guides magnetic flux in a magnetic field sensing direction of the magnetic field detection element, and the magnetic flux guided by the yoke in the magnetic field sensing direction is detected by the magnetic field detection element. The magnetic field detection elements are interconnected by a bridge circuit (not shown) or the like, and thus the magnetic sensor 1 can measure an external magnetic field. figure 1 Shown is a magnetic sensor 1 comprising first and second magnetic field detection elements 21 , 22 adjacent to each other and first to third yokes 23 , 24 , 25 arranged near the magnetic field detection elements 21 , 22...

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Abstract

The present invention provides a magnetic sensor that easily secures the height of a yoke and easily guides a magnetic field sensing film to detect a magnetic flux in a direction of a magnetic field. The magnetic sensor includes: a first magnetic field detection element (21) having a first magnetic field sensing film (38) for detecting a magnetic field in a first direction (X); and a first yoke (23) comprising (X) The first part (23a) on one side of the first magnetic field sensing film (38) and the second part (23a) in contact with the first part (23a) in the direction (Z) orthogonal to the first direction (X) Part (23b). The average size of the second portion (23b) in the first direction (X) is larger than the average size of the first portion (23a) in the first direction (X).

Description

technical field [0001] The present invention relates to a magnetic sensor and a method of manufacturing the same, in particular, to the configuration of a magnetic yoke of the magnetic sensor. Background technique [0002] In order to guide magnetic flux in the magnetic field sensing direction of the magnetic field sensing film, the magnetic sensor may be provided with a yoke near the magnetic field sensing film. JP2013-172040A, JP2015-94732A and WO2011 / 68146 disclose a magnetic sensor in which a yoke is arranged near a magnetic field sensing film that detects a magnetic field in a first direction. The yoke extends in a second direction orthogonal to the first direction. The magnetic flux emitted from the end of the yoke has a component in the first direction, and the magnetic field sensing film detects the component in the first direction. A plurality of magnetic field sensing films are formed in the first direction, and the yokes and the magnetic field sensing films are ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L43/00H01L43/12
CPCH10N50/00H10N50/01G01R33/0052G01R33/05G01R33/093H01R43/12
Inventor 太田尚城高杉圭祐
Owner TDK CORPARATION