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Interference measurement system and method for sampling rate and sampling uniformity of sampling splitting plate

A technology of interferometric measurement and sampling rate, applied in the direction of measuring devices, machine/structural component testing, optical instrument testing, etc., can solve the problems of small sampling rate difficult to achieve, high measurement accuracy, etc., to achieve easy traceability, high precision, The effect of simple installation

Active Publication Date: 2018-09-18
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The purpose of the present invention is to provide a sampling rate and sampling uniformity measurement system and method based on the principle of dual optical path interference, using the shrinking telescope + self-collimation mirror + dual optical path interference principle to measure the sampling rate and sampling uniformity of the splitting plate, to solve the problem Solve the problem that the traditional measurement method is difficult to achieve high measurement accuracy for a small sampling rate

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  • Interference measurement system and method for sampling rate and sampling uniformity of sampling splitting plate
  • Interference measurement system and method for sampling rate and sampling uniformity of sampling splitting plate
  • Interference measurement system and method for sampling rate and sampling uniformity of sampling splitting plate

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[0032] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0033] From figure 1 It can be seen that the system is composed of an autocollimating mirror 3, a beam-reducing telescope 4, a beam-splitting prism 5, etc., and the sampling splitting plate 1 to be tested is located between the beam-reducing telescope 4 and the beam-splitting prism 5; the sampling splitting plate generally has a certain angle Wedge-shaped flat plate, the sampling reflective surface 2 of the sampling splitting board to be tested is the surface to be measured, and the sampling splitting board can move in the plane where the sampling splitting board is located to realize scanning measurement; the beam shrinking telescope emits and outputs parallel laser through the optical fiber point source 8 and passes through the beam splitting prism 5 is reflected to the sampling splitter 1 to be tested; the function of the splitter prism 5 is...

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Abstract

The invention belongs to an interference measurement system and an interference measurement method for a sampling rate and sampling uniformity of a sampling splitting plate. The interference measurement system comprises a beam reducing telescope and a self-collimating reflector which are arranged along an optical path. A sampling splitting plate to be measured is arranged between the beam reducingtelescope and the self-collimating reflector. The beam reducing telescope outputs parallel laser which is projected onto a sampling reflection surface of the sampling splitting plate to be measured;part of the laser is reflected to the beam reducing telescope by means of the sampling reflection surface of the sampling splitting plate to be measured; and another part of the laser is incident intothe self-collimating reflector after transmitting the sampling splitting plate to be measured, transmits the sampling splitting plate to be measured after being reflected by means of the self-collimating reflector, and then enters the beam reducing telescope. The interference measurement system and the interference measurement method solve the problem that the traditional measurement method is difficult to achieve high measurement precision for the sampling rate of a small share.

Description

technical field [0001] The invention relates to a system and method for measuring the sampling rate and sampling uniformity of a sampling splitting board. Background technique [0002] In a high-power laser system, in order to measure the laser parameters, it is first necessary to sample the laser. One of the common sampling methods is to use a sampling splitter placed in the laser optical path to perform reflection sampling of the laser, which is characterized by a small sampling rate. (generally <1%), in order to minimize the loss of laser output, and at the same time have higher requirements for sampling uniformity, so the sampling rate and sampling uniformity of the sampling splitter must be accurately measured. The traditional measurement method is The dual-light-path spectroscopic method is used for measurement, which has the influence of inconsistency of the double-light paths and it is difficult to achieve high measurement accuracy for a small sampling rate (<5...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
CPCG01M11/0207
Inventor 达争尚高立民陈永权李红光
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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