Acoustic impedance matching layer of ultrasonic transducer and manufacturing method thereof

Abstract

The invention discloses an acoustic impedance matching layer of an ultrasonic transducer. The acoustic impedance matching layer comprises a low density sound velocity layer and a high density sound velocity layer which are arranged successively, wherein the low speed sound velocity layer is prepared from a material A and the high speed sound velocity layer is prepared from a material B; the low speed sound velocity layer is connected to the surface of a focusing lens, and the high speed sound velocity layer is exposed in air or is connected to other apparatuses. The material used by the acoustic impedance matching layer is a substance which can be directly or indirectly obtained in nature. The thickness can be controlled precisely by means of a physical deposition method, the bottleneck ofa conventional process in thickness grinding is overcome, the defect that the method cannot be implemented on a non-planar layer is overcome, and an acoustic impedance matching system with a preciseacoustic impedance value is obtained. The feasible scheme of improving the acoustic wave transmission efficiency between the acoustic lens and a medium is concise in process and high in operability.

Description

technical field [0001] The invention relates to the technical field of ultrasonic transducers, in particular to an acoustic impedance matching layer of an ultrasonic transducer and a manufacturing method thereof. Background technique [0002] Ultrasonic microscopic inspection technology is an effective means to detect the integrity and reliability of electronic packaging and micro-mechanical components, in which the core structure is the ultrasonic transducer. Based on the current situation and development trend of high density and high integration of electronic devices, the requirements for the resolution of detection devices are also continuously increasing. As the core device of this technology, the ultrasonic transducer requires high sensitivity and spatial resolution. At present, commercial ultrasonic microscope transducers generally use high-acoustic-impedance lenses to achieve focusing. There is a large acoustic impedance difference between the lens and the acoustic ...

AI Technical Summary

Problems solved by technology

At present, commercial ultrasonic microscope transducers generally use high-acoustic-impedance lenses to achieve focusing. There is a large acoustic impedance difference between the lens and the acoustic medium, and the particularity of the lens structure makes it difficult to implement the traditional acoustic-impedance matching layer design. Low, the sensitivity of the ultrasonic transducer is limited, and a feasible acoustic impedance matching scheme between the lens and the acoustic medium is urgently needed

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