Intelligent control system for clean room

An intelligent control system and clean room technology, applied in the field of electronic clean rooms, can solve problems such as energy waste and uneven air intake, and achieve the effect of eliminating turbulence, solving turbulence and uneven air intake, and avoiding energy waste.

Inactive Publication Date: 2018-09-28
SHENZHEN LAUN CLEAN TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the above technical solution can alleviate the problem of uneven air supply, a large amount of fresh air and circulating air will appear turbulent when it is discharged from the air supply pipeline, so the fresh air and circulating air will flow through the air inlet near the air supply pipeline, resulting in 2. Use multiple air supply devices to transmit the fresh air and circulatin

Method used

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  • Intelligent control system for clean room
  • Intelligent control system for clean room
  • Intelligent control system for clean room

Examples

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Example Embodiment

[0019] The present invention will be further elaborated and illustrated below in conjunction with specific embodiments and the accompanying drawings: please refer to figure 1 , A clean room intelligent control system, including fresh air mechanism 10, circulating air supply mechanism 20, bifurcated air inlet pipe 30, clean room body 40, return air mechanism 50, exhaust air mechanism 60, fire fighting mechanism 70 and control Agency 80.

[0020] The fresh air mechanism 10, the circulating air supply mechanism 20, the bifurcated air inlet pipe 30, the clean room body 40, the air return mechanism 50 and the exhaust air mechanism 60 are connected in sequence. The circulating air supply mechanism 20 includes an air supply pipe 22, and the bifurcated air intake pipe 30 is provided between the air supply pipe 22 and the clean room body 40. The bifurcated air inlet pipeline 40 includes multiple bifurcated branches, each layer is provided with multiple branches, and each branch is provide...

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Abstract

The invention discloses an intelligent control system for a clean room. The intelligent control system comprises a fresh air mechanism, a circulating air supply mechanism, a clean room chamber body, areturn air mechanism and an exhaust air mechanism which are sequentially connected, wherein the circulating air supply mechanism comprises an air supply pipeline, a bifurcated air inlet pipeline is arranged between the air supply pipeline and the clean room chamber body, the bifurcated air inlet pipeline comprises a plurality layers of bifurcated branches, each layer of the bifurcated branches isprovided with a plurality of branches, each branch is provided with a plurality of sub-branches, a plurality of air inlets are formed in the top of the clean room chamber body, and the air inlets correspond to the sub-branches one by one. The intelligent control system has uniform air intake and energy conservation.

Description

technical field [0001] The invention relates to the technical field of electronic clean rooms, in particular to an intelligent control system for clean rooms. Background technique [0002] With the continuous development of the production process of semiconductor electronic products, more precision and higher integration are the development trend of the industry. The manufacturing process has entered the nanometer era, and the precision requirements for production equipment are becoming more and more stringent. Therefore, in addition to the technological level of the equipment itself needing to meet the production requirements, the production environment in which it is located—the various indicators of the clean room must also be checked. Strictly controlled. [0003] At present, the air supply structure of the clean room is divided into two types: 1. The structure of connecting the air supply pipeline to the air inlet chamber is used to slow down the speed of fresh air and...

Claims

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Application Information

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IPC IPC(8): F24F7/08F24F11/89F24F11/77F24F110/10F24F110/20F24F110/50
CPCF24F7/08F24F11/77F24F11/89F24F2110/10F24F2110/20F24F2110/50Y02B30/70
Inventor 廖志铭
Owner SHENZHEN LAUN CLEAN TECH CO LTD
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