Surface contour scanning method and device
A technology of surface profile and scanning method, applied in the field of scanning the surface profile of a test piece, can solve the problems of difficulty in interpretation, increased scanning time, easy damage of mobile modules, etc., and achieve the effect of reducing scanning time and reducing damage rate
Active Publication Date: 2018-10-16
GALLANT PRECISION MACHINING CO LTD
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Problems solved by technology
[0004] As mentioned above, the test piece has several positions to be tested, and if hundreds or thousands of images are obtained for each position to be tested, the overall number of images will be very large and cause difficulties in interpretation
In addition, the interference objective lens moves axially for a relatively large distance relative to each position to be measured, so the moving module driving the interference objective lens is easily damaged under long-term use
[0005] In addition, when scanning the surface profile of the test piece, the operator usually pays more attention to the two ranges of the upper section and the lower section of the surface profile when inspecting the characteristics of the surface profile of the test piece based on requirements, while for the middle range of the surface profile Less attention, when the height difference of the surface profile of the test piece is too large, the existing three-dimensional shape detection method still scans the overall axial height of the test piece to be measured, that is, the operator is less concerned The middle section of the range is also scanned together, so the overall scanning time will increase, which is not in line with the use efficiency
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[0028] Such as figure 1 As shown, the present invention provides a surface profile scanning device, which includes a scanning unit 1 , a moving module 17 and an integrating unit 18 .
[0029] The scanning unit 1 has a vision module 10 , a first lens 11 , a beam splitter 12 , an interference objective lens 13 , a piezoelectric microactuator 14 , a second lens 15 , and a light source 16 .
[0030] The first lens 11 is located below the vision module 10 . The beam splitter 12 is located below the first lens 11 . The piezoelectric microactuator 14 is located below the beam splitter 12 . The interference objective lens 13 is coupled with a piezoelectric microactuator 14 . The second lens 15 is located on one side of the beam splitter 12 . The light source 16 is located on a side of the second lens 15 away from the beam splitter 12 . The light source 16 is a white light, and the light source 16 can be set inside the scanning unit 1 or outside the scanning unit 1 , and then guid...
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The invention discloses a surface contour scanning method and device. The method comprises the steps of setting a scanning area, setting a test piece to be at least one scanning area and at least onemoving area; performing scanning, moving an interference objective lens arranged in a scanning unit in the scanning area, so that the scanning unit scans a test piece in the scanning area and obtainsscanning information, calculating the scanning information so as to form a scanning contour value corresponding to the scanning area; and a moving module coupled to the scanning unit controlling the scanning unit to move a preset distance in the moving area, when the scanning unit is not scanned, setting a preset contour value corresponding to the moving area; and obtaining a surface contour, combining the preset contour value and the scanning contour value to obtain the surface contour of the test piece.
Description
technical field [0001] The present invention relates to a surface contour scanning method and its device, and in particular to a method and its device for scanning the surface contour of a test piece. Background technique [0002] White light interferometry is usually applied to the detection of three-dimensional shape. In the existing three-dimensional shape detection method, a test piece is divided into several positions to be tested, and a white light is projected to a position to be tested of the test piece through an interference objective lens. The interference objective lens moves in an axial direction, so that the white light is projected to different axial positions of the position to be measured. [0003] In order to obtain the surface profile of the test piece, the interference objective lens moves a plurality of predetermined distances in one axial direction at each position of the test piece to be measured, and a vision module obtains multiple images at each pr...
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IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02G01B11/2441
Inventor周智川陈建国杨沛哲
OwnerGALLANT PRECISION MACHINING CO LTD