The invention relates to a multifilm piezoelectric element in harddisk micro-
actuator and its preparing method. It makes piezoelectric
ceramic film by
casting method or web printing technique, etc., and makes medium
electrode layer by web printing technique, etc. It adopts Ag / Pd
electrode and PMN-PZT material to realize low- temperature coburn (reducing from >1300 deg.C to 1030-1190 deg.C). The invention increases the free-end displacement of magnetic head
cantilever installed with piezoelectric micro-
actuator to >=0.80 mum and
resonance frequency to >15KHz (at the condition of external
voltage <=40V) to make the micro-
actuator have the characters of excellent displacement /
voltage sensitivity,
resonance frequency, driving force, etc., thus applied to accurate addressing and path location of secondary micro- actuator of a computer harddisk double-stage
servo system. It can be widely applied to other technical fields of micro-actuation and
position control.