A One-Dimensional Fast Steering Mirror
A rapid control, mirror technology, applied in instruments, installations, optics, etc., can solve the problems of poor anti-vibration and shock resistance of mirrors, high mirror height, and small range of rotation deflection angles of mirrors, reducing The effect of small overall height, improved anti-vibration and anti-shock ability, and improved anti-interference ability
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[0026] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0027] Such as Figure 1 to Figure 9 The shown one-dimensional fast control mirror includes a mirror 1, an outer frame, an actuator mechanism 5, a capacitive micro-displacement sensor and two pre-compression mechanisms 8. Comprising a base, a lever mechanism 9 and two mirror frames 7, the base has a longitudinal side plate 10 and two transverse side plates 13, an electrical connector 11 is installed on the longitudinal side plate 10, and two transverse side plates 13 One end is respectively connected to the ends of the longitudinal side plates 10, the other ends of the two transverse side plates 13 are respectively connected to the lever mechanism 9 through a first flexible hinge 15 as a fulcrum, and the two mirror frames 7 are respectively located on the two transverse sides. Above the plate 13 and the lever mechanism 9, the mirror frame 7 is in the shape of "几", t...
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