Directional detecting system of crystal bar

Abstract

The invention relates to the technical field of crystal processing, and specifically relates to a directional detecting system of a crystal bar. The system comprises a moving mechanism, a rotating mechanism, a bearing plate, an X-ray generating assembly and a signal system assembly, wherein the rotating mechanism is mounted on the moving mechanism and can be driven by the moving mechanism to move;the bearing plate is mounted at the front end of the rotating mechanism and is driven to rotate through the rotating mechanism; a positioning probe, the X-ray generating assembly, the signal system assembly, a first adjusting mechanism and a second adjusting mechanism are arranged on the bearing plate; the positioning probe is propped to the crystal bar during detection; the X-ray generating assembly is driven to circumferentially move through the first adjusting mechanism; the signal system assembly is driven to move in a circular arc shape through the second adjusting mechanism. The systemis capable of accurately detecting the angle information of the crystal bar, so that the crystal bar angle detecting accuracy and the detecting efficiency can be greatly improved.

Description

technical field [0001] The invention relates to the technical field of crystal processing, in particular to a crystal rod orientation detection system. Background technique [0002] Before processing the artificially grown monocrystalline silicon ingots into wafers of various specifications, it is necessary to orient the rough ingots first. After finding out the required direction, use the grinding equipment to process the cylindrical surface of the ingot into a reference edge or Notch, and then bond the ingot to the material plate according to the measured angle value, and when bonding the ingot, the reference edge or notch of the crystal ingot cylinder must point to the specified angle. In the above process, the angle detection of crystal rod is particularly important. Once deviation occurs, it will not only affect the bonding accuracy, but also seriously affect the accuracy of subsequent monocrystalline silicon slicing, resulting in a high failure rate of crystal slicing ...

AI Technical Summary

Problems solved by technology

In the above process, the angle detection of crystal rod is particularly important. Once a deviation occurs, it will not only affect the bonding accuracy, but also seriously affect the accuracy of subsequent monocrystalline silicon slices, resulting in a high failure rate of crystal sliced ​​products

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