Point Diffraction Interferometric Detection System Based on Nanowire Waveguide

Abstract

The invention discloses a point diffraction interference detection system based on nano wire waveguide. A conventional pinhole point diffraction interference system has problems of weak pinhole transmission light intensity, pinhole alignment error and incident wavefront aberration, and is difficult to perform light intensity adjustment operation on two interference wavefronts. The point diffraction interference detection system based on nano wire waveguide solves the problem that in the point diffraction interference system, the contrast is adjustable and a high-precision reference wavefront with a large numerical aperture is difficult to generate. The point diffraction interference detection system based on nano wire waveguide is characterized in that a nanowire waveguide is used to limita light wave to exit in the wavelength size aperture so as to generate a nearly ideal large numerical aperture reference spherical wave, wherein a single mode fiber connected to the nanowire waveguide can effectively filter the impact of the incident wavefront aberration; and by means of the small size of the point diffraction interference detection system based on nano wire waveguide, the pointdiffraction interference detection system based on nano wire waveguide can be arranged at the center of sphere of a spherical mirror to be tested to implement amplitude adjusting and phase shift operation of the reference wavefront. The point diffraction interference detection system based on nano wire waveguide can realize high-precision generalized detection of the surface shape of spherical mirrors with different reflectivity, and has an important engineering application value.

Description

technical field [0001] The invention relates to a point diffraction interference detection system based on a nanowire waveguide. Background technique [0002] Among many wave aberration detection devices, the point diffraction reference interferometer uses the nearly ideal spherical wavefront generated by diffraction as the reference wavefront, which is not limited by the accuracy of reference standard components, and has become a leader in high-precision optical detection technology. The key to its high detection accuracy is that the near-ideal spherical wavefront is formed by light field diffraction with an extremely small cross-section whose size is comparable to the wavelength. For the diffraction reference interferometer in the visible light band, there are two main ways to generate the diffraction reference wavefront, one is through the pinhole etched on the metal film layer, and the other is through the diffraction of the optical field in the optical fiber at the end ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problems of adjustable contrast and difficult to generate large numerical aperture and high-precision reference wavefront in point diffraction interference system, and to provide a point diffraction interference detection system based on nanowire waveguide

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