The invention relates to the technical field of
electron microscopy, and discloses a built-in
detector probe and a
scanning electron microscope. The
scintillation crystal is connected with one end of the
electron beam conduit; the axis of the
light guide column is perpendicular to the axis of the
electron beam conduit, one end of the
light guide column is provided with a parabolic cylinder with an opening facing the other end of the
light guide column, and the parabolic cylinder is provided with a reflecting film; the electron beam conduit penetrates through two opposite sides of the light guide column and passes through the parabolic cylinder; the
scintillation crystal is also connected with the light guide column; and the
photomultiplier is connected with one end, far away from the parabolic cylinder, of the light guide column. According to the invention, the parabolic cylinder is arranged on the light guide column and the reflecting film is arranged on the parabolic cylinder, so that a similarly vertical secondary electronic
signal can be collimated into a horizontal optical
signal, a large number of optical signals are captured and transmitted to the
photomultiplier, and the capture efficiency of photons and the
signal-to-
noise ratio of an image can be remarkably improved.