Ultra-static vacuum testing device and method
A testing device and vacuum technology, which is applied in the testing of measuring devices, pump devices, machines/structural components, etc., can solve problems such as inability to test, inaccurate test results of spacecraft ground vacuum, etc., to isolate vibration effects and ensure accuracy Effect
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[0041] The present invention will be further described below in conjunction with accompanying drawing.
[0042] Such as figure 1 , 2 As shown, the ultra-quiet vacuum testing device provided in this embodiment includes a first air bearing platform, a second air bearing platform, a vacuum testing unit, an object loading platform unit and a vacuum pumping unit.
[0043] The first air bearing platform comprises the first supporting plate 13 of annular structure and the first air cylinder 1-12 that is arranged on the lower end of the first supporting plate 13; 1-12 are divided into four groups, which are evenly distributed on the lower end of the first support plate 13; the three first cylinders of each group are evenly arranged along the edge of the first support plate 13 toward the middle; cylinders 1-12 and cylinders 14- 17 Driven by compressed air, its pressure is not less than 0.5MPa.
[0044] The second air bearing platform comprises a second support plate 18 and the secon...
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