Quartz crystal resonance sensor welded by using low-temperature glass solder and preparation method of quartz crystal resonance sensor

Abstract

The invention relates to a sensor and a preparation method thereof, in particular, a quartz crystal resonance sensor welded by using low-temperature glass solder and a preparation method of the quartz crystal resonance sensor. An existing atomic force microscope is a micro cantilever structure-based force sensor, and the micro cantilever structure-based force sensor needs a huge optical detection system, and the quality factor and sensitivity of the micro cantilever structure-based force sensor are low, and as a result, the micro cantilever structure-based force sensor cannot be applied to extreme test conditions, while, with the quartz crystal resonance sensor of the invention adopted, the above situation can be avoided. According to the quartz crystal resonance sensor welded by using the low-temperature glass solder, two or four identically-sized-and-shaped quartz crystal resonance cantilevers are welded together through the low-temperature glass solder. The preparation method of the quartz crystal resonance sensor includes the following steps that: two or four identically-sized-and-shaped quartz crystal resonators are vertically fixed on a welding table; melt low-temperature glass solder is added at welding seams through electric soldering iron; and the two or four identically-sized-and-shaped quartz crystal resonators are welded together at 320 to 375 DEG C, so that the quartz crystal resonance sensor can be obtained. With the preparation method, a quartz crystal resonance sensor can be obtained.

Description

technical field [0001] The invention relates to a sensor and a preparation method. Background technique [0002] At present, as an important analytical instrument for characterizing the surface structure and performance of materials, the atomic force microscope has been widely used in research experiments on various nano-related subjects in semiconductors, nano-functional materials, biology, chemical industry, food, pharmaceutical research and scientific research institutes. and other fields. The atomic force microscope has many advantages, such as providing a true three-dimensional surface map, and most importantly, it has no special requirements for the sample and does not need to be conductive, so it is more widely applicable. However, with the development of material science, simply measuring the surface morphology of materials can no longer meet the needs of characterizing material properties at the nanometer scale. Other information, thus multi-frequency atomic force...

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Problems solved by technology

[0006] The purpose of the present invention is to solve the problem that the existing atomic force microscope is based on the force sensor of the micro-cantilever structure. The force sensor of the micro-cantilever structure requires a huge light detection system, has low quality factor, low sensitivity and cannot be used in extreme test conditions. problem, and provide a kind of quartz crystal oscillator sensor and its preparation method using low-temperature glass solder soldering

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