Vacuum evaporation crucible and vacuum evaporation equipment

Abstract

The invention relates to a vacuum evaporation crucible and vacuum evaporation equipment, and relates to the technical field of vacuum evaporation. According to the vacuum evaporation crucible and thevacuum evaporation equipment, an organic material coating with uniform thickness can be plated on a substrate. According to the technical scheme, the vacuum evaporation crucible is characterized by comprising a crucible main body and a cover body; the crucible main body is provided with an opening; the cover body covers the opening of the crucible main body and is detachably connected to the crucible main body; a main nozzle and an auxiliary nozzle enabling the interior to be communicated with the exterior of the crucible main body are arranged on the cover body; the main nozzle is perpendicularly arranged on the cover body; and the auxiliary nozzle and the vertical direction form a preset angle. When the vacuum evaporation crucible performs coating work on the substrate of an organic light-emitting device, a coating material sprayed out by the auxiliary nozzle can perform thickness compensation on the coating sprayed out by the main nozzle and plated on the surface of the substrate, so that the finally-plated coating is more uniform.

Description

technical field [0001] The invention relates to the technical field of vacuum evaporation, in particular to a vacuum evaporation crucible and vacuum evaporation equipment. Background technique [0002] The basic structure of an organic light-emitting device is to stack multiple layers of organic thin-film materials between two electrodes. The total thickness of the organic thin-film materials is about several hundred nanometers, which is the same order of magnitude as the light-emitting wavelength. Due to the mismatch of optical properties of various materials, the photons generated inside the OLED structure will have various optical effects such as reflection, refraction, waveguide, absorption and re-emission among the materials in the transmission process, and the change of its luminous properties is not only related to It is related to the characteristics of the material itself, and also related to the change of the optical structure of the device. [0003] However, in t...

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Problems solved by technology

[0003] However, in the organic light-emitting devices manufactured by using the coating equipment in the prior art, the thickness of the organic thin film layer on the substrate is not uniform enough, and it often occurs that the center of the substrate is thicker and the edge is thinner.

In addition, in the design of the device structure of the micro-resonator, in order to achieve the best light extraction effect, the resonant wavelength of the resonant cavity needs to be set at the peak wavelength of the luminous body’s intrinsic luminescence, and the luminous body needs to be placed near the common antinode of the two mirror electrodes. , but due to the difference in the uniformity of the film thickness of each organic thin film layer, the length of the resonant cavity at different positions on the substrate and the position of the luminous body and the resonant cavity are different, which eventually affects the red shift or blue shift of the peak value of the coupled light, resulting in The color uniformity of the OLED display is poor, and the display effect cannot meet the requirements

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