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Apparatus for fixing objects by means of vacuum

A technology for fixing objects and equipment. It is used in auxiliary welding equipment, welding/cutting auxiliary equipment, welding equipment, etc., and can solve the problems that objects cannot be fixed and solutions are not flexible.

Active Publication Date: 2018-11-23
LASER IMAGING SYST GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Due to the defined dimensions of the vacuum chamber, this solution is relatively inflexible, since objects that do not correspond to the expected increments of the object format cannot be firmly fixed in the edge area

Method used

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  • Apparatus for fixing objects by means of vacuum
  • Apparatus for fixing objects by means of vacuum
  • Apparatus for fixing objects by means of vacuum

Examples

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Embodiment Construction

[0018] A device for immobilizing objects by means of a vacuum is basically as figure 1 Design shown in. It comprises a table 1 extending in the x and y directions, wherein vacuum chambers 11 , 12 , 13 are formed in the table 1 in the z direction for the planar distribution of the vacuum connected to the table 1 . The vacuum chambers 11 , 12 , 13 are covered by a stage top 10 . A plurality of perforations 14 are arranged in the table top 10 in a grid-like manner.

[0019] Just below the stage top 10 , a first vacuum chamber 11 is arranged in contact with two adjacent side surfaces of the stage 1 . This first vacuum chamber 11 is permanently connected to a vacuum extraction device 5 which is connected to the table 1 . The first vacuum chamber 11 determines the minimum format M of the effective surface area W of the table 1 in the x and y directions.

[0020] The second vacuum chamber 12 and the third vacuum chamber 13 enable the effective surface area W of the table 1 to ext...

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PUM

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Abstract

The invention relates to an apparatus for fixing objects by means of vacuum. The invention is based on the problem of making it possible to vary the effective surface area of a vacuum table in a finely graduated manner so that objects with base surface areas of different sizes can be arrested securely. The problem is solved by an apparatus for fixing objects by means of vacuum, in that the table (1) has arranged on it, alongside a first vacuum chamber (11), a second vacuum chamber (12) and a third vacuum chamber (13), which extend the first vacuum chamber (11) and the second vacuum chamber (12) all the way in the x direction, wherein the second vacuum chamber (12) has a structure made up of a multiplicity of parallel and line-forming grooves (15) which run in the x direction, are connectedto one another in the y direction via a first connecting channel (22) and can be released or closed in series by means of a line-switching device (2) relating to the first vacuum chamber (11), the third vacuum chamber (13) has a structure made up of a multiplicity of parallel and column-forming grooves (16) which run in the y direction, are connected to one another in the x direction via a secondconnecting channel (42) and can be released or closed in series by means of a column-switching device (4) relating to the first vacuum chamber (11), and certain sections of the third vacuum chamber (13) can be released or closed in series in the y direction simultaneously, and in a manner corresponding to the number and positions of the line-forming grooves (15), by means of the line-switching device (2) in correspondence with the second vacuum chamber (12).

Description

technical field [0001] The invention relates to a device for immobilizing objects by means of vacuum. Background technique [0002] In some cases, the machining, finishing or inspection of especially very delicate objects is only possible through the use of vacuum tables. In particular, in the case of very thin and flat objects such as, for example, printed circuit boards, flat screen substrates, semiconductor wafers or printed materials, it is hardly possible to use otherwise mainly local-action clamping devices for firm and non-destructive fixing. possible. Fixing on a vacuum table is a very gentle method for sensitive objects, since the force required for fixing can be distributed over a large surface and distributed evenly over the bottom area of ​​the object. Furthermore, fixing by means of a vacuum is a very quick and easy operation compared to other clamping means. [0003] In order to create a vacuum to securely hold the object on the vacuum table, it is first req...

Claims

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Application Information

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IPC IPC(8): G03B27/60H01L21/683B23K37/04B25B11/00G03F7/20B41F15/20
CPCB25B11/005B41F15/20G03F7/707H01L21/6875H01L21/68785H01L21/6838
Inventor 乌尔班·肖尔茨-格拉赫乌韦·克洛斯基京特·弗莱明
Owner LASER IMAGING SYST GMBH
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