Supercharge Your Innovation With Domain-Expert AI Agents!

A kind of microsensor, preparation and use method thereof

A micro-sensor and micro-groove technology, applied in the field of micro-nano sensors, can solve the problems of inability to effectively capture micron-level and sub-micron-level impurity particles in the air, inconvenient on-site analysis, and large volume.

Active Publication Date: 2020-10-27
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a microsensor, its preparation and its use method, which are used to solve the problem that the detection equipment used in the prior art to accurately measure the quality of particulate matter in the environment is too large and not It is convenient for on-site analysis; and the problem that traditional resonant micro-cantilever mass-sensitive sensors cannot effectively capture micron and submicron impurity particles in the air

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of microsensor, preparation and use method thereof
  • A kind of microsensor, preparation and use method thereof
  • A kind of microsensor, preparation and use method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0083] Such as figure 1 As shown, the present invention provides a microsensor, comprising:

[0084] A chip substrate 20, the chip substrate 20 includes an air inlet 23 and an air outlet 24;

[0085] A resonant micro-cantilever beam 21, the resonant micro-cantilever beam 21 extends a predetermined distance outward from the chip substrate 20, and includes a micro-channel 22 and a cavity 25 connected to the micro-channel 22 inside, the The height of the micro-channel 22 and the cavity 25 is not less than the width of the air inlet 23; connected, the cavity 25 is provided with a micro filter grating 26, the gap between the micro filter grating 26 and the inner wall of the cavity 25 is not greater than the gap between the micro filter grating 26 itself, and the micro filter grating The gap of the grid 26 itself is smaller than the width of the air inlet 23 .

[0086] As an example, the micro-grid 26 runs through the cavity 25, that is, the micro-grid 26 is in contact with the u...

Embodiment 2

[0093] Such as Figure 2-10 Shown, the present invention provides a kind of preparation method of microsensor, comprises the following steps:

[0094] Such as figure 2 As shown, step S1 is first performed: a silicon substrate 1 is provided, and the silicon substrate 1 includes one of a single-side polished silicon substrate and a double-sided polished silicon substrate, and then prepared on the polished surface of the silicon substrate 1 Micro grating comprising micro cylinders.

[0095] Specifically, preparing the micro-grid includes the following steps:

[0096] S1-1: Etching a number of cylindrical grooves on one side of the silicon substrate 1 by ion reactive etching, the gap between adjacent cylindrical grooves ranges from 0.05 μm to 4 μm, preferably 0.1 μm to 2 μm, In this embodiment, the gap between the cylindrical grooves is set to 0.1 μm to block most PM2.5 particles.

[0097] S1-2: A thermal oxidation process is used to form a protective layer 2 on the inner sur...

Embodiment 3

[0113] The present invention also provides a method for using a microsensor, comprising the following steps:

[0114] S-A: Use the phase-locked loop circuit to collect the resonant frequency of the microsensor synchronously as the baseline;

[0115] S-B: Connect the vacuum pump to the gas outlet of the microsensor, turn on the vacuum pump, and suck the gas to be measured into the microchannel from the inlet of the microsensor, and the particles within the scale selection range will be combined with the microchannel The connected micro-filter grid intercepts, causing the drop of the resonant frequency of the micro-sensor; wherein, the micro-filter grid is located in the cavity connected with the micro-channel, and the height of the micro-channel and the cavity is Not less than the width of the air inlet, the gap between the micro-grid and the inner wall of the cavity is not greater than the gap between the micro-grid itself, and the gap between the micro-grid itself is smaller ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
diameteraaaaaaaaaa
heightaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides a microsensor, preparation and using method thereof. According to the microsensor, micro-particles in a specific diameter range can be screened and captured from a to-be-detected gas through the air inlet of the microsensor and a micro-filter grid which is positioned in the cavity and has a specific gap size, and density and other environmental information of the micro-particles can be acquired through the micro-particle quality measured and captured by a resonant micro-cantilever. The microsensor has small equipment size, is convenient for field analysis, has a wide application range, and can be used for effectively capturing micron and sub-micron impure particles in the to-be-detected gas.

Description

technical field [0001] The invention belongs to the field of micro-nano sensors, and relates to a micro-sensor, a preparation method and a use method thereof. Background technique [0002] There are impurities of different particle sizes in the air. Micron and submicron impurity particles can enter the alveoli of the human body, and when they reach a certain concentration, they will have a huge impact on human health. If the impurity particles carry bacteria or viruses, May cause damage to the respiratory system, cardiovascular system, and nervous system. [0003] At present, the analysis and detection methods for air impurities often use continuous environmental particle monitors and optical detection methods. Among them, the continuous environmental particle monitor is not convenient for on-site analysis and large-scale application due to the large size of the detection equipment; while the sensitivity and detection accuracy of the optical detection method are low, and it...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/06
CPCG01N15/0618G01N15/0656
Inventor 李昕欣包宇洋于海涛蔡晟然
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com