Vacuum fluorination device with non-contact seal transmission structure
A transmission structure, non-contact technology, applied in electromechanical devices, engine seals, electric components, etc., can solve problems such as assembly difficulties, high precision requirements, gas leakage, etc., and achieve the effect of ensuring stable work and ensuring adjustment accuracy
Inactive Publication Date: 2018-11-30
JRB PACKING CO LTD
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Problems solved by technology
In the prior art, the furnace of the vacuum fluorination furnace is usually equipped with blades to increase the fluidity of the gas. The blades are connected to the drive motor outside the furnace body through the transmission shaft. The seal between the transmission shaft and the furnace body is usually a liquid labyrinth seal or a floating seal. Ring seal, but these two sealing structures require high precision and are difficult to assemble. Gas leakage will still occur after long-term use. The sealing performance cannot be guaranteed, and it cannot meet the requirements of the furnace body for vacuum.
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[0017] Shown in conjunction with the accompanying drawings is a specific embodiment of a vacuum fluorination device with a non-contact sealed transmission structure of the present invention. First, it includes a vacuum box 1 and a blade 2 arranged inside the vacuum box 1. The vacuum box 1. A driving motor 3 is provided on the outside, and the driving motor 3 has a power output shaft 31, and also includes a blade transmission shaft 21 coaxially arranged with the power output shaft 31, and the blade transmission shaft 21 passes through the vacuum box 1 And one end thereof is connected to the blade 2, the vacuum box 1 is provided with a bearing 7 for installing the blade transmission shaft 21, and the other end of the blade transmission shaft 21 is provided with a sealing connection with the vacuum box 1. The sealing sleeve 4.
[0018] The power output shaft 31 is provided with an outer magnet 5 , and the blade transmission shaft 21 is provided with an inner magnet 6 magnetically...
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Abstract
The invention discloses a vacuum fluorination device with a non-contact seal transmission structure. The vacuum fluorination device comprises a vacuum chamber and a blade arranged in the vacuum chamber. The vacuum chamber is externally provided with a driving motor. The driving motor is provided with a power output shaft. The vacuum fluorination device further comprises a blade transmission shaftcoaxial with the power output shaft. The blade transmission shaft penetrates through the vacuum chamber, and one end of the blade transmission shaft is connected with the blade. The other end of the blade transmission shaft is sleeved with a sealing sleeve connected with the vacuum chamber in a sealed mode. The power output shaft is provided with an outer magnetic body. The blade transmission shaft is provided with an inner magnetic body coupled with the outer magnetic body. The sealing sleeve comprises a sealing partition board with the thickness of 10 mm, and the sealing partition board is arranged between the outer magnetic body and the inner magnetic body. The distances between the outer magnetic body, and the sealing partition board and between the inner magnetic body and the sealingpartition board are both 2.5 mm. The vacuum fluorination device can enable the blade and the blade transmission shaft to sustainably and stably operate in a completely sealed environment, meanwhile can meet the requirement of the vacuum chamber for the vacuum degree and cannot leak gas even if after long-term use.
Description
technical field [0001] The invention relates to a vacuum fluorination device with a non-contact sealed transmission structure. Background technique [0002] As we all know, when the vacuum fluorination furnace is working, it needs to be filled with highly harmful fluorine gas in the furnace, so the vacuum degree of the furnace body is very high, and the gas cannot leak. In the prior art, the furnace of the vacuum fluorination furnace is usually equipped with blades to increase the fluidity of the gas. The blades are connected to the drive motor outside the furnace body through the transmission shaft. The seal between the transmission shaft and the furnace body is usually a liquid labyrinth seal or a floating seal. However, these two sealing structures require high precision and are difficult to assemble. Gas leakage will still occur after long-term use, and the sealing performance cannot be guaranteed, which cannot meet the requirements of the furnace body for vacuum. Cont...
Claims
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Login to View More IPC IPC(8): F16J15/16H02K49/00
Inventor 钱玉茂陈金春周艳
Owner JRB PACKING CO LTD