Etching solution composition
A technology of composition and etching solution, applied in the direction of surface etching composition, vacuum evaporation plating, coating, etc., can solve the problems such as IZO film damage, poor characteristics of processing sheets, difficulty, etc., to achieve the characteristics of processing sheets improved effect
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Embodiment 1～3 and comparative example 1～8
[0072] 10 kg of an etching solution composition containing the components and composition (weight%) of Table 1 below was produced.
[0073] [Table 1]
[0074]
experiment example 1
[0075] Experimental example 1: IZO single-layer film damage test
[0076] In order to perform an IZO single-layer film damage test based on the presence or absence of fluoride, an etching process was performed using the etching solution compositions of Examples 1 to 3 and Comparative Examples 1 to 3, respectively. The etching process uses an experimental equipment (model name: ETCHER (TFT), SEMES company) of the spray etching method. During the etching process, the temperature of the etching solution composition is maintained at 25°C, and the total etching time is set to 60 seconds. IZO substrate was tested for etching. At this time, the injection pressure was 0.1 MPa, and the exhaust pressure was maintained at 20 Pa.
[0077] The cross-section and surface profile of the IZO substrate after the etching process were examined by SEM (product of Hitachi, model name S-4700), and they are shown in Figs. 1(a) and 1(b).
[0078] 1(a), it can be seen that in the case of the PR (photosensi...
experiment example 2
[0080] Experimental example 2: Cone angle (T / A) changes with the number of processed sheets
[0081] The etching solution compositions of Examples 1 to 3 and Comparative Examples 4 and 5 were maintained at 25°C, respectively, and performed Etching test of the substrate. The total etching time was set to double the Cu etching time as a reference, and over etch was performed. Regarding the experimental equipment and exhaust conditions, the same was performed as in Experimental Example 1, and the results are shown in Table 2 and figure 2 .
[0082] [Table 2]
[0083]
[0084] Refer to Table 2 and figure 2 It can be seen that in the case of Examples 1 to 3, when the content of sulfamic acid satisfies the content range of the present invention, more specifically satisfies the preferred content range, the T / A change with the number of processed sheets does not change much and is stable .
[0085] However, when sulfamic acid is not included or deviates from the content range of the presen...
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