Contact head, detection device for electric detection device
An electrical detection and contact head technology, applied in the field of contact heads, to achieve the effect of reducing tolerance requirements
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[0026] figure 1A schematic illustration shows a section through an electrical testing device 1 which is designed for electrical contacting of a substrate 2 having a plurality of electrical contact points. The substrate 2 is designed, for example, as a wafer 3 , a circuit board or a solar cell and can be placed, in particular, on a carrier 4 of the testing device 1 . The carrier 4 , also referred to as a chuck, is designed such that it can be cooled or heated, wherein cooling and / or heating devices are preferably integrated into the carrier 4 or arranged thereon for this purpose. This makes it possible for the substrate 2 to be subjected to different temperatures during the execution of the test, so that the functionality of the substrate 2 can be determined even at different temperatures. For contacting the substrate 2 , the test device 1 has a so-called test card 5 , which has a contact head 6 and a coupling device 7 for carrying out the test. The contact head 6 carries a p...
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