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Purging module clamp

A fixture and bolt technology, applied in the field of wafer box purging module, to achieve the effect of dust removal

Inactive Publication Date: 2018-12-18
程梦轩
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, there is a cost problem in replacing all the existing load ports with load ports equipped with such a purge function, and there are many types of wafer cassettes, so when changing the type of wafer cassette, it is necessary to install a corresponding load port separately The problem

Method used

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] see Figure 1-3, the present invention provides a technical solution for purging module fixtures: its structure includes a wafer box shell 1, a module loading box 2, a debris suction and cleaning box 3, and a blower blower box 4, and the wafer box shell 1 is riveted by bolts Connected to the outer surfaces of the debris suction cleaning box 3 and the blower blower box 4, the module loading box 2 is embedded between the debris suction cleaning box 3 and ...

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Abstract

The invention discloses a purging module clamp. The purging module clamp comprises a wafer box shell, a module loading box, a sundries suction cleaning box and a purging blower box, wherein the sundries suction cleaning box is provided with a suction vacuum pump, a dust removal rotating device and a control transmission gear set; and the purging blower box is provided with an air supply control device, a circuit start triggering device and a control transmission motor. The purging module clamp has the beneficial effects that an internal circuit can be triggered to be connected through weight of the module, so that the suction vacuum pump and the air supply control device are driven to work, the dust removal effect is realized, no additional loading port is required, and safety is ensured.

Description

technical field [0001] The invention relates to the field of wafer box purging modules, in particular to a purging module fixture. Background technique [0002] In general, semiconductor elements are obtained by depositing and patterning various substances in the form of thin films on a wafer as a substrate. To this end, various processes such as deposition process, etching process, purging process, and drying process are required. [0003] To perform these steps, devices for transferring wafers are widely used. Among them, a load port is commonly used to supply wafers loaded in a wafer cassette to a semiconductor transfer device. [0004] In addition, if there are foreign objects inside the wafer cassette, it will cause defective wafers, so gas purge is used to remove foreign objects. The initial load port model does not have this purge function, but the newly developed load port adds nitrogen N2 purge function to solve these problems. [0005] At present, there is a cos...

Claims

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Application Information

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IPC IPC(8): B08B9/08B01D49/00
CPCB01D49/00B08B9/0861
Inventor 程梦轩
Owner 程梦轩
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