Device, system and method for testing piezoelectric coefficient
A piezoelectric coefficient and test pressure technology, which is applied to measuring devices, measuring electrical variables, instruments, etc., can solve the problems of cumbersome operation process, inability to detect, low detection efficiency, etc., and achieve the effect of simple operation and high detection efficiency.
Inactive Publication Date: 2018-12-18
成都大超科技有限公司
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Therefore, it is necessary to destroy the piezoelectric film sample every time it is tested, and it is necessary to apply force on the upper and lower surfaces of the piezoelectric film at the same time. Multiple locations are used for detection, the detection efficiency is low, and the detection results are also very inaccurate
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[0031] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0032] Please refer to figure 1 , the first embodiment of the present invention provides a device 10 for testing the piezoelectric coefficient, which is used for testing the piezoelectric coefficient of the piezoelectric material, especially for testing the piezoelectric coefficient of the piezoelectric film, and the device for testing the piezoelectric coefficient 10 includes a workbench 17, a sample stage 15, a displacement device 11 and a probe 13. The sample stage 15 is used to carry the piezoelectric film sample 20 to be tested and is grounded. The displacement device 11 and t...
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The invention relates to the technical field of piezoelectric material detection, in particular to a device, a system and a method for testing piezoelectric coefficients. The device for testing piezoelectric coefficients of the invention comprises a probe, and the probe is used for being connected with an external data processing device. The probe comprises a detection probe and a piezoelectric chip. When the detection probe touches the surface of a piezoelectric film close to the probe, the probe can acquire voltage signals of the surface of the piezoelectric film and the piezoelectric chip and transmit the voltage signals to the external data processing device, thereby calculating the piezoelectric coefficients of a piezoelectric film sample. According to the device, the system and the method for testing the piezoelectric coefficients, the piezoelectric coefficients can be detected based on one surface of the piezoelectric film without damaging the piezoelectric film, the operation is simple, and the detection efficiency is high.
Description
【Technical field】 [0001] The invention relates to the technical field of piezoelectric material detection, in particular to a device, system and method for testing piezoelectric coefficients. 【Background technique】 [0002] Piezoelectric material is a crystal material with voltage appearing on both ends of the piezoelectric material when it is subjected to pressure, and the most important material parameter of piezoelectric material is the piezoelectric coefficient D 33 . [0003] Existing methods for measuring the piezoelectric coefficient of piezoelectric materials are to make the piezoelectric film into a small block, apply a certain force to the upper and lower surfaces of the small piezoelectric film, and test the piezoelectric film on the upper and lower surfaces. The voltage to calculate the piezoelectric coefficient D of the piezoelectric film 33 . Therefore, it is necessary to destroy the piezoelectric film sample every time it is tested, and it is necessary to a...
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Login to View More IPC IPC(8): G01R29/22
CPCG01R29/22
Inventor 吴露张千王开安陈健强
Owner 成都大超科技有限公司