A mucilage roller for use in a water film etching process

Abstract

The invention discloses a mucilage roller for water film etching process, include a cylinder, A liquid roll wheel with a plurality of pieces of middle part is vertically fixed in that middle part of the cylinder, A liquid wheel disk with a plurality of sheet end is vertically fixed at both end of that cylinder, the middle belt liquid roller and the end belt liquid roller have the same radius, A plurality of gap discs are arranged in the notches, the gap discs are fixed on the cylinder, the radii of the plurality of gap discs increase or decrease in turn, and the gap discs with the largest radius are smaller than the radii of the end belt discs. Through the arrangement of the multi-sheet liquid wheel disk, the invention can not reduce the moving speed of the battery sheet on the etching groove due to the liquid level and the battery sheet in the moving process caused by the screw direction, and can also contact the edge of the battery sheet, thus avoiding the situation of water film breaking, and has strong practicability and is very worthy of popularization.

Description

technical field [0001] The invention relates to the technical field of silicon wafer etching devices, in particular to a viscous roller used in a water film etching process. Background technique [0002] In order to achieve a better etching effect in the silicon wafer etching process, water film equipment is generally installed on the etching device. However, during the etching process of the water film, the water film is prone to water breakage, resulting in poor etching lines and affecting Wafer quality. [0003] Observing the etching tool, it was found that the phenomenon of water film breaking was mainly due to the mucus roller in the etching tank, as shown in the attached manual figure 1 As shown, the original slime roller is designed as a whole cylinder with a small sharp thread shape, which is installed at the front end of the etching tank. The purpose of designing the thread shape is to provide better slime on the back of the silicon wafer and prevent the back from ...

AI Technical Summary

Problems solved by technology

[0002] In order to achieve a better etching effect in the silicon wafer etching process, water film equipment is generally installed on the etching device. However, during the etching process of the water film, the water film is prone to water breakage, resulting in poor etching lines and affecting Wafer Quality

[0003] Observing the etching tool, it was found that the phenomenon of water film breaking was mainly due to the mucus roller in the etching tank, as shown in the attached manual figure 1 As shown, the original slime roller is designed as a whole cylinder with a small and sharp thread shape, which is installed at the front end of the etching tank. The purpose of designing the thread shape is to better mucus on the back of the silicon wafer and prevent the back from being damaged by air bubbles. Or the mucus is not good enough to make the engraving impermeable, but there is an obvious defect in the viscous roller in the prior art: when the silicon wafer passes through the viscous roller, the roller rotates, and the thread belt fluid occasionally touches the edge of the silicon wafer, causing the water film to break. , the solution climbs to the surface of the silicon wafer and causes over-etching, which affects the etching quality of the silicon wafer, leads to the generation of defective wafers, and greatly reduces the economic benefit

[0005] However, during the use of the above-mentioned viscous roller for water film etching process, there are still the following obvious defects: 1. The form of thread is used to drive the movement of the liquid surface and the battery sheet. During the movement, the sheet shifts towards the direction of rotation, which causes the etching effect of the battery sheet to deteriorate; 2. The setting of the notch leads to the deterioration of the liquid-carrying effect of the roller with the same length, which also makes the battery sheet in the The speed of movement on the etching groove is reduced, thereby reducing the number of etched cells in the same period of time, which affects production efficiency; Offset, the liquid will still touch the edge of the cell, causing the water film to break

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