A Micro Electrolytic Machining Device with Electrostatic Actuation Auxiliary Feed

Abstract

The invention provides an electrostatic actuation auxiliary feeding type micro-electrolysis machining device. The micro-electrolysis machining device comprises an electrostatic actuation auxiliary feeding system, the electrostatic actuation auxiliary feeding system comprises a planar electrode for machining a workpiece, a machining power supply, an electrostatic field electrode and an auxiliary power supply, wherein the electrostatic field electrode is used for driving the plane electrode, the two ends of the machining power supply are connected with the planar electrode and the workpiece correspondingly, the two ends of the auxiliary power supply are correspondingly connected with the planar electrode and the electrostatic field electrode, an insulating film enabling the auxiliary power supply to not participate in electrolytic machining is arranged on the outer surface of the electrostatic field electrode, and the auxiliary power supply only generates an electrostatic field to drivethe planar electrode to deform. The electrostatic actuation auxiliary feeding type micro-electrolysis machining device has the beneficial effects that the auxiliary power supply generates the electrostatic field to drive the planar electrode to deform, so that electrostatic actuation auxiliary feeding is achieved, micro-feeding is realized by utilizing a planar electrode plate under the actuationof the static electricity, and the problem that the electrostatic actuation deformation amount is too small due to the limitation of the micro-electrolysis machining voltage is well solved.

Description

technical field [0001] The invention relates to an electrolytic processing device, in particular to a micro electrolytic processing device with electrostatic actuation auxiliary feeding. Background technique [0002] Micro electrolytic machining is a processing form based on redox (charge transfer). Generally speaking, the size of metal ions is about 0.1nm. Compared with spark discharge, it not only has higher precision and better flatness, but also has no electrode loss during processing. Based on this, micro-electrolytic machining has great development potential in micro- and nano-processing. In micro electrolytic machining, the main difficulty is the control of precision and efficiency. In order to obtain micron-level precision, the machining gap is usually controlled within a few microns. The micro-electrolytic machining model belongs to the double-layer capacitance model, and the machining gap determines the size of the equivalent capacitance and equivalent resistance...

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Problems solved by technology

In order to achieve high-precision machining effects, the machining voltage machining of conventional micro-electrolytic machining is used (the power supply voltage of micro-electrolytic machining is usually about 20V), the electrostatic force generated by it is too small, and the bending deformation of the driving electrode sheet is too small. But it didn't work, and the effect achieved in actual processing was not ideal enough.

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