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Linear evaporation source and vacuum evaporation device

A linear evaporation source and evaporation hole technology, applied in the field of evaporation, can solve the problem that the linear evaporation source cannot achieve the uniformity of evaporation

Inactive Publication Date: 2019-01-18
合肥欣奕华智能机器股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention discloses a linear evaporation source and a vacuum evaporation device, which are used to solve the problem that the linear evaporation source cannot achieve long-term stable evaporation uniformity

Method used

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  • Linear evaporation source and vacuum evaporation device
  • Linear evaporation source and vacuum evaporation device
  • Linear evaporation source and vacuum evaporation device

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Embodiment Construction

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0038] Please refer to Figure 1 to Figure 9 .

[0039] Such as figure 1 with figure 2 As shown, a kind of linear evaporation source provided by the embodiment of the present invention includes:

[0040] The crucible 1 has an opening extending along its length;

[0041] The mounting plate 2 is detachably mounted on the opening of the crucible 1, and the mounting plate 2 is provided with a plurality of evaporation holes 20 arranged along the extending dire...

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Abstract

The invention relates to the technical field of evaporation and discloses a linear evaporation source and a vacuum evaporation device. The linear evaporation source comprises a crucible, a mounting plate and a plurality of nozzles, wherein the crucible is provided with an opening part extending in the length direction of the crucible; the mounting plate is detachably mounted at the opening part ofthe crucible, and a plurality of evaporation holes arranged in the extending direction of the opening part and penetrating the mounting plate in the thickness direction are formed in the mounting plate; the plurality of nozzles are in one-to-one correspondence with the evaporation holes in the mounting plate, and each nozzle is detachably mounted to the corresponding evaporation hole. The linearevaporation source can guarantee long-term stable evaporation uniformity; the crucible and an evaporation material are not needed to be replaced in a maintaining process of the linear evaporation source, so that maintenance operation is simple and convenient and consumes shorter time, influence on the production efficiency is smaller, and update cost is lower.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to a linear evaporation source and a vacuum evaporation device. Background technique [0002] In recent years, in order to meet the requirements of high-resolution display and large-size design of organic electroluminescent displays (OLEDs), it is necessary to improve the efficiency of the coating process applied to large-area glass; this linear evaporation source corresponding to large-area glass substrates It is required to achieve uniform evaporation and deposition of organic materials with various characteristics (sublimable materials, liquefiable materials, and materials with both sublimable and liquefiable properties, etc.) while maintaining a certain pressure and temperature; however, due to the large area The uniformity of vapor deposition on the substrate is highly dependent on the spray behavior (speed, distribution, direction, etc.) Therefore, it is difficult to ensu...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/12
CPCC23C14/12C23C14/243
Inventor 李浩永金薰丁熙荣金甲锡
Owner 合肥欣奕华智能机器股份有限公司
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