Non-refrigeration infrared polarization detector pixel structure and preparation method

Abstract

The invention provides a non-refrigeration infrared polarization detector pixel structure and a preparation method. The non-refrigeration infrared polarization detector pixel structure comprises a bottom layer, a middle layer and an upper layer, wherein the bottom layer comprises a reading circuit substrate, a first metal electrode layer, a metal reflection layer and a first medium protection layer, and the first metal electrode layer, the metal reflection layer and the first medium protection layer are arranged on the reading circuit substrate; the middle layer comprises a first supporting layer, a thermosensitive layer, a second medium protection layer, a second metal electrode layer and a third medium protection layer; and the upper layer comprises a second supporting layer and an optical grating layer, wherein the second supporting layer is arranged above the third medium protection layer, and the optical grating layer is arranged on the second supporting layer and comprises a plurality of optical gratings arranged in sequence. By use of the non-refrigeration infrared polarization detector pixel structure and the preparation method, volume is greatly reduced, thermal noise introduced by the optical grating layer is lowered, and polarization detection sensitivity is improved so as to be favorable for increasing the extinction ratio of the optical grating layer.

Description

technical field [0001] The present application relates to the field of MEMS process manufacturing in semiconductor technology, and in particular to an uncooled infrared polarization detector pixel structure and a preparation method. Background technique [0002] Infrared polarization detection is a technology that increases the information dimension by obtaining the polarization information of each point on the basis of infrared intensity detection. It can not only obtain the infrared intensity information of the target in two-dimensional space, but also obtain the polarization information of each point on the image. By using the increased polarization dimension, the difference between the camouflaged and dim targets and the background can be enhanced, which is conducive to improving the detection and identification capabilities of targets. [0003] The current common infrared polarization detection methods include time-division method, amplitude-division method, aperture-di...

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Problems solved by technology

[0004] In the field of visible light and infrared detection, a large number of literatures have reported the method of preparing micro-gratings on the pixel. In the field of uncooled infrared imaging, a patent has reported a micro-polarization structure, but the grating layer and the thermal The sensitive layer is on the same micro bridge surface, and the thermal conduction isolation between the two is not realized. Therefore, on the one hand, the thermal noise of the grating layer is introduced, on the other hand, the heat capacity of the bridge surface is increased, and the polarization detection efficiency is low.

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