Uncooled Infrared Polarization Detector Pixel Structure and Preparation Method

Abstract

The application provides an uncooled infrared polarization detector pixel structure and a preparation method, wherein the uncooled infrared polarization detector pixel structure includes: a bottom layer, the bottom layer includes a readout circuit base and a The first metal electrode layer on the seat, the metal reflective layer and the first dielectric protection layer; the intermediate layer, the intermediate layer includes the first support layer, the heat sensitive layer, the second dielectric protection layer, the second metal electrode layer and the third Dielectric protection layer; upper layer, the upper layer includes a second support layer disposed on the third dielectric protection layer and a grating layer disposed on the second support layer, the grating layer includes several sequentially arranged raster. The pixel structure and preparation method of the uncooled infrared polarization detector provided by the application has a greatly reduced volume, reduces the thermal noise introduced by the grating layer, improves the polarization detection sensitivity, and is beneficial to increase the extinction ratio of the grating layer.

Description

technical field [0001] The present application relates to the field of MEMS process manufacturing in semiconductor technology, and in particular to an uncooled infrared polarization detector pixel structure and a preparation method. Background technique [0002] Infrared polarization detection is a technology that increases the information dimension by obtaining the polarization information of each point on the basis of infrared intensity detection. It can not only obtain the infrared intensity information of the target in two-dimensional space, but also obtain the polarization information of each point on the image. By using the increased polarization dimension, the difference between the camouflaged and dim targets and the background can be enhanced, which is conducive to improving the detection and identification capabilities of targets. [0003] The current common infrared polarization detection methods include time-division method, amplitude-division method, aperture-di...

AI Technical Summary

Problems solved by technology

[0004] In the field of visible light and infrared detection, a large number of literatures have reported the method of preparing micro-gratings on the pixel. In the field of uncooled infrared imaging, a patent has reported a micro-polarization structure, but the grating layer and the thermal The sensitive layer is on the same micro bridge surface, and the thermal conduction isolation between the two is not realized. Therefore, on the one hand, the thermal noise of the grating layer is introduced, on the other hand, the heat capacity of the bridge surface is increased, and the polarization detection efficiency is low.

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