A Coplanar Suspended Fully Isolated Sensor
A suspended, fully isolated technology, applied in the field of sensors, can solve the problems of inability to achieve coplanar suspension, low service life, rigid structure of pressure sensors, etc., to achieve the effect of improving flexibility, improving static pressure performance, and expanding use
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[0021] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0022] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, and therefore cannot be constru...
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