The invention relates to a method for distinguishing PN inversion caused by an
oxygen donor effect based on a
crystal segment position, which belongs to the technical field of
silicon wafer processing, and comprises the following operation steps of: 1, before statistics, confirming that a
crystal segment eliminates the
oxygen donor effect after high-temperature annealing, the
crystal segment is a P-type product, and no material mixing occurs in the process; step 2, counting 316 crystal section bars in the range of 0-2200mm at the
single crystal position, wherein 13 N-type crystal section bars appear; the number of the P type is 303; and it is judged that no N-type phenomenon occurs after 1400 mm according to the occurrence position. And 3, coding the positions of the crystal segments according to rules, and distinguishing the
silicon wafers without serious
oxygen donor effect, namely the
silicon wafers without PN inversion. And 4, carrying out process monitoring according to the code of the crystal segment position, and observing the position of the corresponding block in the
single crystal from the information of the block during use. The method has the advantages that whether the corresponding silicon
wafer has the serious
oxygen donor effect or not can be quickly confirmed, the silicon
wafer without the serious
oxygen donor effect can be selected for use, and convenience is brought to the use of an electrical monitoring process of a
chip manufacturing enterprise.