The invention discloses a method for reducing an
oxygen donor content of a Czochralski monocrystal. The method comprises the steps of seeding, shouldering, rotating, obtaining equal
diameter, ending and
oxygen controlling. The method disclosed by the invention has the advantages as follows: the furnace pressure is reduced to accelerate the pumping of a main pump, increase
argon flow, exhaust the SiO volatile gas more quickly, and reduce the content of
oxygen which is fed to the
molten silicon; the revolving speed of a
crucible where the monocrystal grows is reduced, reaction between the
molten silicon and the
quartz crucible can be slowed down, and the
oxygen content in the
molten silicon can be reduced, so that the content of oxygen fed to the monocrystal can be reduced, and further the type P monocrystal donor effect can be fundamentally reduced; the revolving speed of the
seed crystal can be increased, the
latent heat release of
crystallization can be quickened, and the
cooling speed can be increased, so that the monocrystal can quickly pass through the
oxygen donor forming area to reduce the
oxygen donor effect.