The invention discloses a method for reducing an 
oxygen donor content of a Czochralski monocrystal. The method comprises the steps of seeding, shouldering, rotating, obtaining equal 
diameter, ending and 
oxygen controlling. The method disclosed by the invention has the advantages as follows: the furnace pressure is reduced to accelerate the pumping of a main pump, increase 
argon flow, exhaust the SiO volatile gas more quickly, and reduce the content of 
oxygen which is fed to the 
molten silicon; the revolving speed of a 
crucible where the monocrystal grows is reduced, reaction between the 
molten silicon and the 
quartz crucible can be slowed down, and the 
oxygen content in the 
molten silicon can be reduced, so that the content of oxygen fed to the monocrystal can be reduced, and further the type P monocrystal donor effect can be fundamentally reduced; the revolving speed of the 
seed crystal can be increased, the 
latent heat release of 
crystallization can be quickened, and the 
cooling speed can be increased, so that the monocrystal can quickly pass through the 
oxygen donor forming area to reduce the 
oxygen donor effect.