Laser direct writing device based on Damman grating

Abstract

The invention relates to a laser direct writing device based on a Damman grating. STED super-resolution is introduced into a Damman grating laser direct writing optical path part, STED super-resolution imaging is fully utilized for overlapping two kinds of spatially-distributed spots of excitation light and loss light, fluorescent light in an overlapping region is quenched so that only a very small range of a central region can be radiated by the fluorescent light to achieve super-resolution imaging, a smaller focused spot can be produced, the writing density is increased accordingly, and high-density grating writing can be achieved. On this basis, multiple grating lines can be directly written at a time by utilizing the Damman grating, and the direct writing parallelism of laser direct writing is improved; the device is suitable for writing high-density high-precision large-sized diffractive optical elements.

Description

technical field [0001] The invention relates to laser direct writing technology, in particular to a laser direct writing device based on a Damman grating. Background technique [0002] Large-size diffraction gratings have more and more applications in high-power laser and chirped pulse compression technology, and are the core key optical devices in optical systems and scientific instruments such as large astronomical telescopes and inertial confinement fusion laser ignition systems. The preparation of diffractive optical components with large size, high precision, and high-power laser applications has become an urgent problem to be solved. Microelectronics processing technology has made great progress in the field of fabrication of diffractive optical elements. As a new type of technology in microelectronic processing technology, laser direct writing technology has received more and more attention, and the development of laser direct writing technology is becoming more and ...

AI Technical Summary

Problems solved by technology

In the prior art, the Daman grating can be used to realize the preparation of large-area gratings. However, only using the Daman grating can increase the speed of direct writing, but the accuracy of direct writing is still limited by the diffraction limit of Rayleigh resolution of the laser.

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