Inductive superconducting edge detector and preparation method thereof
A detector and inductive technology, applied in the field of inductive superconducting edge detectors and its preparation, can solve the problems of weak photon absorption, inaccurate detection, poor use effect of superconducting transition edge detectors, etc.
Active Publication Date: 2022-04-19
NAT INST OF METROLOGY CHINA
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Problems solved by technology
[0004] The superconducting transition edge detector is a very sensitive detection instrument. The traditional superconducting transition edge detector has weak absorption of photons, and the influence of the observation environment makes the superconducting transition edge detector use poorly and the detection is not accurate enough.
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[0052] In order to make the object of the present invention, the technical solution and advantages more clearly understood, the following in conjunction with the accompanying drawings and embodiments of the present invention will be further elaborated. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to qualify the present invention.
[0053] See Figure 1 and Figure 2 , the present invention provides an inductive superconducting edge detector 10, comprising: substrate 100, absorbing layer 200, dielectric layer 300, insulating layer 400, superconducting film layer 500 and Josephson bridge junction 600; the absorbing layer 200 is disposed on a surface of the substrate 100; the media layer 300 is disposed in the absorbing layer 200 away from the substrate 100 of the surface, the media layer 300 has a permeability The insulating layer 400 covers the absorbing layer 200 and the dielectric layer ...
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Abstract
The invention relates to an inductive superconducting edge detector and a manufacturing method thereof. The inductive superconducting edge detector comprises: a substrate, an absorbing layer, a dielectric layer, an insulating layer, a superconducting thin film layer and a Josephson bridge Junction; the absorbing layer is arranged on one surface of the substrate; the dielectric layer is arranged on the surface of the absorbing layer away from the substrate, and the dielectric layer has anti-reflection properties; the insulating layer covers the The absorbing layer and the dielectric layer are arranged; the superconducting thin film layer is arranged on the surface of the insulating layer away from the substrate, and is arranged around the absorbing layer and the dielectric layer in a continuous closed structure; the Josephson bridge junction is arranged on the superconducting thin film layer. The inductive superconducting edge detector includes a dielectric layer with anti-reflection effect on photons, which improves the absorption efficiency of the inductive superconducting edge detector for single photons.
Description
Technical field [0001] The present invention belongs to the field of superconducting electronic information technology, in particular to an inductive superconducting edge detector and a preparation method thereof. Background [0002] The measurement of the basic physical quantities of individual particles requires extremely sensitive detectors. Superconducting transition edge sensors (TES) is one such detector, which is composed of superconducting films, and the operating temperature is between its superconducting state and the normal normal in a very narrow range, that is, the superconducting resistance is between zero and normal values. [0003] Since Andrews proposed the superconducting transition edge detector in 1949, there has been tremendous progress in the superconducting transition edge detector. Compared with room temperature semiconductor single-photon detectors, such as avalanche diodes, or photomultiplier tubes, superconducting transition edge detectors have the adv...
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IPC IPC(8): H01L39/02H01L39/22H01L39/24
CPCH10N60/805H10N60/0156H10N60/12H10N60/0912
Inventor 钟青王雪深李劲劲曹文会钟源王兰若
Owner NAT INST OF METROLOGY CHINA