Energy-saving fresh air system for clean room

Abstract

The invention discloses an energy-saving fresh air system for a clean room. The fresh air system comprises three air flues, the first air flue comprises fresh air subjected to heat exchanging with return air in an air return main channel, the second air flue comprises return air exhausted from a return air auxiliary channel and filtered through a first filter unit, and the third air flue comprisesreturn air entering a multi-stage filter unit from the return air main channel to be purified. When air exhausted out of the return air main channel is low in cleanliness degree, high in filter costor incapable of being purified to the needed cleanliness, return air waste can be directly exhausted to an air treatment chamber. Due to design of the fresh air system, the fresh air need amount in the clean room can be greatly reduced, and the energy consumption of the fresh air unit can be greatly reduced.

Description

technical field [0001] The invention relates to the technical field of clean room fresh air, in particular to an energy-saving fresh air system for a clean room. Background technique [0002] Cleanroom technology (cleanroom) is a new technology born to meet the requirements of precision, miniaturization, high purity, high quality and high reliability of experimental research and product processing. Clean rooms are mostly used in precision and high-precision quality requirements such as microelectronics, biopharmaceuticals, surgical treatment, and precision instrument manufacturing. Therefore, clean workshops have high requirements for air temperature, humidity, and cleanliness. Although the unidirectional flow clean room can achieve a high degree of cleanliness, the cost is high and the construction and maintenance costs of the unidirectional flow clean room are relatively high. Whether it is from the construction of the fresh air system of the clean room or the capital inv...

AI Technical Summary

Problems solved by technology

Although the unidirectional flow clean room can achieve a high degree of cleanliness, the cost is high and the construction and maintenance costs of the unidirectional flow clean room are relatively high. Room requirements, whether it is from the construction of the fresh air system of the clean room or the capital investment in the operation process, the capital investment of the turbulent flow clean room is far less than that of the unidirectional flow clean room

[0003] However, the turbulent flow clean room is often due to the unreasonable design in the early stage. To ensure the quality of fresh air in the clean room, the only way to increase the number of air changes and increase the fresh air volume is to greatly increase the operating capital cost of the clean room fresh air system.

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