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Liquid material discharge device, coating device and coating method thereof

A liquid material and control device technology, which is applied to the surface coating liquid device, valve device, coating, etc., can solve the problems of uneven discharge volume, uncertain coating shape or coating position, splashing, etc., to achieve Good responsiveness, prevents scattered drawing lines, and stable ejection effect

Active Publication Date: 2021-04-09
MUSASHI ENG INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the process of applying a liquid resin (liquid material) to a substrate on which semiconductor components are mounted (for example, potting or underfill), if there are bubbles in the liquid material, the discharge volume will be reduced. Unevenness, inconstant coating shape or coating position (drawing lines are scattered), air bubbles are discharged simultaneously with the discharge and the liquid material is splashed, excess liquid adheres to the periphery of the discharge port of the nozzle, etc., various adverse effects

Method used

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  • Liquid material discharge device, coating device and coating method thereof
  • Liquid material discharge device, coating device and coating method thereof
  • Liquid material discharge device, coating device and coating method thereof

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no. 1 approach 》

[0052] The discharge device 1 according to the first embodiment of the present invention is of a type in which the communication hole 7 of the valve seat 6 is opened by the upward movement of the valve stem 21 to discharge the liquid material, and is closed by the downward movement of the valve stem 21 to stop the discharge. The discharge device is mounted on the coating device 101 in a negative pressure space and used. In the discharge device 1 , the discharge control device 33 controls the operation of the electric actuator 28 to adjust the speed or acceleration of the valve rod 21 , thereby preventing the generation of air bubbles. In addition, the position detection mechanism 34 for detecting the contact position of the valve stem 21 and the valve seat 6 is provided, so that even if the valve stem 21 or the valve seat 6 is worn, the communication hole 7 of the valve seat 6 can be reliably closed. .

[0053] Hereinafter, first, the configuration of the discharge device 1 w...

no. 2 approach 》

[0102] Figure 8 The liquid material discharge device 1 of the second embodiment shown differs from the first embodiment mainly in that the storage container 2 is not a syringe through which the valve rod 21 is inserted, but a syringe connected via an extending member 60 . Hereinafter, differences from the first embodiment will be mainly described, and descriptions of common elements may be omitted.

[0103] The stem driving system (the part above the main body lower member 10 ) inside the hood 47 is the same as that of the first embodiment. The actuator 28 reciprocates the actuator rod 31 up and down, so that the valve rod 21 reciprocates up and down via the drive transmission member 26 , the upper slider 37 and the lower slider 38 .

[0104] The main body lower member 10 of the second embodiment is different from the first embodiment in that it is continuous with the extending portion 58 extending downward. Wherein, the main body lower member 10 and the extension part 58 m...

no. 3 approach 》

[0117] Figure 9 and Figure 10 The liquid material discharge device 1 of the third embodiment shown mainly includes an outer frame 201, an inner frame 218, a sensor 43, and a detection plate 45 mounted on the inner frame, and has a structure in which the sensor 43 detects that the inner frame moves up and down. The aspect is different from the first embodiment. Hereinafter, the same symbols are assigned to the same elements as those of the first embodiment, and explanations may be omitted.

[0118]

[0119] Figure 9 A partially cutaway front view of the discharge device according to the third embodiment is shown in . Figure 10 displayed in Figure 9 C-C arrow view in . Furthermore, sometimes the Figure 10 In , the actuator side is referred to as "back", the opposite side across the central axis is referred to as "front", and the left and right surfaces between the rear and front are referred to as "side".

[0120] The valve rod 21 of the third embodiment is a line...

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Abstract

The present invention provides a liquid material discharge device and method, which can suppress the generation of air bubbles caused by the upward movement of a rod in a negative pressure environment. Provided is a liquid material discharge device and method which solve the problem of leakage of liquid material due to insufficient closing of the valve stem tip due to wear of the valve stem tip or valve seat. A liquid material discharge device comprising: a storage container; a compressed gas supply source that pressurizes the storage container; a nozzle that has a discharge flow path; a valve stem that performs a reciprocating action; an actuator that drives the valve stem; A seat, which has a communication hole communicating with the discharge flow path; and a discharge control device, which controls the actuator and opens and closes the communication hole with the front end of the valve stem; and is used in a negative pressure space, and the above discharge control device uses the above The acceleration time (Au) when the valve stem of the actuator is raised is controlled within the range of 2 to 300 [ms], thereby preventing the generation of air bubbles accompanying the rising of the valve stem.

Description

technical field [0001] The invention relates to a device and method for discharging liquid materials in a negative pressure environment. The "negative pressure environment" in this specification includes a vacuum environment. Background technique [0002] In the process of applying a liquid resin (liquid material) to a substrate on which semiconductor components are mounted (for example, potting or underfill), if there are bubbles in the liquid material, the discharge volume will be reduced. Various adverse effects such as unevenness, inconstant coating shape or coating position (drawing lines are scattered), air bubbles are discharged simultaneously with the discharge, causing the liquid material to splash, and excess liquid adheres to the periphery of the discharge port of the nozzle. [0003] As a method for eliminating the adverse effects of these air bubbles, there is a method such as placing the liquid material in a vacuum environment and degassing it. The most commo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C5/00B05C11/10B05D1/26
CPCB05C5/00B05C11/10B05D1/26B05C5/0225B05C11/1034B05C5/0237B05C11/1047B05C5/02B05C11/1026F16K1/42
Inventor 生岛和正
Owner MUSASHI ENG INC
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