Micromechanical electrostatically driven curved comb tooth structure

Abstract

The invention provides a micromechanical electrostatically driven curved comb tooth structure, relating to the technical field of micromechanical electrostatic driving. The micromechanical electrostatically driven curved comb tooth structure comprises n identical curved comb tooth groups, wherein the n curved comb tooth groups are uniformly distributed at an outer edge of a device with arc-shapedexterior, each curved comb tooth group comprises static comb teeth and dynamic comb teeth, the static comb teeth and the dynamic comb teeth are in staggered cooperation and take on an F-shaped hammerstructure, under external electrostatic driving, the dynamic comb teeth moves close to or away from the static comb teeth in an curved way with the center of the device with arc-shaped exterior as a center of a circle, when the static comb teeth and the dynamic comb teeth cooperate, a first moving electrode stretches between a first fixed electrode and a second fixed electrode, and a second movingelectrode is outside the second fixed electrode in a radial direction. Under the same vacuum environment and driving voltage as the traditional technology, mechanical motion displacement is increased, and the processing difficulty is not raised.

Description

Technical field [0001] The invention relates to the technical field of micromechanical electrostatic driving, in particular to an arc-shaped comb tooth structure driven by micromechanical electrostatic driving. Background technique [0002] Electrostatic drive is an important method of micromechanical drive technology, and it has a wide range of applications in the current MEMS field. At present, the most common electrostatic drive structure is the rectangular flat comb-tooth array structure. However, the current rectangular comb tooth electrostatic driver has the problems of small driving force and high driving voltage. However, the application of micro-electromechanical devices often has upper limit requirements on the driving voltage, and it is hoped to reduce the driving voltage or increase the driving displacement as much as possible. The common way to solve this contradiction is to increase the number of comb teeth to form an array. The disadvantage of increasing the num...

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Problems solved by technology

[0003] Invention patent application "A Comb Structure Driven by Micromechanical Electrostatics" (Application No. 201410440148.7) proposes that the shape of the comb adopts a combination of triangle and trapezoid, or a combination of triangle and rectangle, or a combination of trapezoids, reducing The driving voltage of the structure, but it is only applicable to the driving mode in which the driving displacement is perpendicular to the comb direction

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