Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Power transmission method for radio frequency power source

A technology of power transmission and radio frequency power supply, applied in circuits, discharge tubes, electrical components, etc., can solve problems such as adverse effects on device service life, not necessarily successful ignition of process gas, and failure to consider ignition.

Active Publication Date: 2019-03-01
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
View PDF4 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

First, the ignition problem is not considered in impedance matching and current distribution, so it does not necessarily guarantee the successful ignition of the process gas
Secondly, even if it can successfully ignite the process gas, since the gas composition and pressure in the reaction chamber will change greatly after ignition, impedance matching and current distribution need to be re-performed, which will affect the efficiency of impedance matching and current distribution
Finally, if the process gas is successfully ignited during the process of impedance matching and current distribution, the adjustable capacitors used for current distribution in the power transmission network are easily damaged by ignition, which will adversely affect the service life of the device

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Power transmission method for radio frequency power source
  • Power transmission method for radio frequency power source
  • Power transmission method for radio frequency power source

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0029] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present disclosure.

[0030] An embodiment of the present disclosure provides a power transmission method of a radio frequency power supply, which is suitable for inductively coupled plasma (ICP) semiconductor processing equipment. The above impedance matching and power distribution methods are realized through a power transmission network. like figure 1 As shown, one end of the power transmission network 2 is connected to th...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The disclosure provides a power transmission method for a radio frequency power source, using a power transmission network to transmit power of the radio frequency power source to a reaction chamber to excite the process gas in the reaction chamber. The method comprises the following steps: performing a first adjustment on the power transmission network; determining whether the process gas is successfully ignited; if the ignition is not successful, continuing the first adjustment; if the ignition is successful, performing a second adjustment on the power transmission network in real time, andsimultaneously performing impedance matching and power distribution on the radio frequency power source.

Description

technical field [0001] The present disclosure relates to the technical field of semiconductor manufacturing, in particular to a power transmission method of a radio frequency power supply. Background technique [0002] The RF power of the inductively coupled plasma processing equipment is distributed to the coil through the power transmission network, and the coil is used to excite the process gas to generate plasma. The power transmission network is used to match the output impedance of the RF power supply, so that the power from the RF power supply can be transmitted to the reaction chamber with maximum efficiency. The power transfer network is also used to adjust the current distribution ratio of the coils to achieve the target distribution ratio. [0003] Existing techniques utilize power transfer networks to perform impedance matching and current distribution directly in parallel. This method is relatively simple and direct, but it has the following problems. First, ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H03K19/0175H01J37/32
CPCH03K19/017545H01J37/321
Inventor 韦刚成晓阳
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com