Calibration method for sheet film platinum resistance temperature sensor

A temperature sensor and calibration method technology, applied in thermometers, thermometer testing/calibration, instruments, etc., can solve the problems of high and low temperature on-chip thin-film platinum resistors that cannot be accurately calibrated, so as to improve the accuracy of temperature measurement, accurate extraction, and operation simple effect

Inactive Publication Date: 2019-03-08
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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Problems solved by technology

[0013] The purpose of the present invention is to provide a calibration method for on-chip thin-film platinum resistance temperature sensors to solve the technical problem in the prior art that high and low temperature on-chip thin-film platinum resistance cannot be accurately calibrated

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  • Calibration method for sheet film platinum resistance temperature sensor
  • Calibration method for sheet film platinum resistance temperature sensor
  • Calibration method for sheet film platinum resistance temperature sensor

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Embodiment Construction

[0037] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0038] Please also refer to figure 1 and figure 2 , the calibration method of the on-chip thin-film platinum resistance temperature sensor provided by the present invention will now be described. The calibration method of the on-chip platinum resistance temperature sensor is based on the high and low temperature probe station 1, comprising the following steps:

[0039] Open the rotary handle 4, and pull out the temperature control platform 5 from the microchamber 6;

[0040] Place the thin-film platinum resistance temperature sensor in the vacuum adsorption hol...

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Abstract

The invention provides a calibration method for a sheet film platinum resistance temperature sensor and belongs to the technical field of semiconductor measurement. The method is based on a high-low temperature probe platform and includes the steps of placing the sheet film platinum resistance temperature sensor on a temperature control platform; pressing every two DC probes to a PAD pressing point; connecting four DC probes to two Hi jacks and two Lo jacks of a digital multimeter respectively; adjusting the set temperature of the high-low temperature probe platform and reading resistance values through the digital multimeter; calculating resistance temperature coefficients according to a formula and then utilizing the formula to calculate the actual temperature. According to the providedcalibration method for the sheet film platinum resistance temperature sensor, influences of an external environment on the sheet film platinum resistance temperature sensor in a micro-chamber are small, the resistance values can be precisely obtained in a high-low temperature environment, the resistance temperature values in different temperature ranges are adopted for calculating the resistance temperature coefficients, and the accuracy of temperature measurement of the sheet film platinum resistance temperature sensor is improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor measurement, and more specifically relates to a calibration method for an on-chip thin-film platinum resistance temperature sensor. Background technique [0002] In semiconductors, the resistance value of thin-film platinum resistors has a linear relationship with its temperature in the range near normal temperature, which is why thin-film platinum resistors are often used as temperature sensors in semiconductor testing. In semiconductors, it is necessary to calibrate the temperature characteristics of thin film resistance, that is, to determine the temperature coefficient of resistance to characterize the relationship between the resistance value of the sensor and its temperature. The temperature coefficient of resistance indicates the relative change of the resistance value (resistivity) when the unit temperature changes. As shown in formula (1) [0003] [0004] In fact, for the conv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K15/00
CPCG01K15/005
Inventor 许晓青刘岩梁法国李锁印翟玉卫吴爱华刘晨孙静韩志国赵琳
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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